Surface-Energy Tunable Layer for Directed Self-Assembly Alignment
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Solution Overview
Problem
Current methods for forming patterned features on substrates, such as those used in electronic device manufacturing, are costly and require multiple steps, especially when using directed self-assembly techniques, which can be challenging for achieving desired alignment and smaller feature sizes.
Innovation Solution
The method involves forming a surface-energy modifying or tunable layer on the substrate, which facilitates the alignment of directed self-assembly material by creating differential surface energies, allowing for fewer process steps and more efficient alignment of block copolymer components, thereby enabling the formation of patterned features with smaller dimensions and higher pitch.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional photoresist techniques are used to pattern substrate surfaces, then the process is relatively simple and cost-effective, but the minimum feature size and pitch are limited and cannot achieve smaller dimensions required for high-density devices
Solution Approach 1:
A brush layer is introduced as an intermediary between the substrate and the directed self-assembly material. This brush layer mediates the interaction by providing specific surface properties that guide the alignment of polymer domains, enabling the DSA process to achieve the desired fine pitch while maintaining process simplicity
Solution Approach 2:
The surface energy parameters of the brush layer are specifically controlled to match the affinity requirements of the directed self-assembly material. By adjusting the brush layer's surface properties, the patent enables precise alignment of polymer domains without requiring complex sidewall treatments or pre-existing patterns
2Manufacturing precision
If directed self-assembly techniques are used to reduce pitch and form finer patterns, then smaller feature dimensions are achieved, but the process becomes more complex and costly due to additional steps like brush layer formation and sidewall treatment
Solution Approach 1:
The brush layer formation is merged with the substrate preparation step, eliminating the need for separate sidewall treatment processes. The brush layer is formed on the substrate surface in a single step that simultaneously provides the necessary surface properties for directed self-assembly alignment
Solution Approach 2:
The brush layer serves as a simplified intermediary that replaces complex sidewall treatment processes. Instead of requiring multiple steps to treat sidewalls for proper orientation, the brush layer provides the necessary surface properties in a single formation step, reducing overall process complexity
3Ease of operation
If directed self-assembly material is deposited on a standard substrate surface, then the process is simple, but the alignment of polymer domains is poor due to lack of affinity control
Solution Approach 1:
The surface energy parameters of the brush layer are specifically tuned to match the affinity requirements of the directed self-assembly material. This parameter control enables the polymer domains to align properly with the substrate features while maintaining the simplicity of the deposition process
Solution Approach 2:
The brush layer acts as an intermediary that provides the necessary affinity control between the substrate and the directed self-assembly material. It mediates the interaction by presenting appropriate surface properties that guide polymer domain alignment without complicating the deposition process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the complexity and cost of pattern formation by aligning directed self-assembly material components with fewer steps, enabling the creation of patterned features with smaller dimensions and higher pitch, suitable for advanced electronic devices.
Implementation Method 1
a polar or a non-polar part of the block copolymer can preferentially align on a polar or a non-polar portion of the substrate surface
Implementation Method 2
directed self-assembly (DSA) techniques have been developed to reduce a pitch of patterned features on a substrate surface
Data Source
AI summary
Methods of forming patterned features and structures including the patterned features are disclosed. Exemplary methods include selectively forming a surface energy modified surface on a sidewall of structures and/or forming a surface-energy tunable layer on a surface of the substrate. The surface energy modified surface can be formed by depositing material and/or by treating the sidewall surface and/or by treating a surface adjacent the sidewall surface.