Surface Inspection Conditions for Scatterer Type Detection
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Solution Overview
Problem
Conventional surface defect inspection techniques face challenges in determining the type of defect using a simple configuration with a small number of optical devices, as they either require complex setups or fail to identify defect types accurately.
Innovation Solution
An inspection condition presentation apparatus and method that utilizes a surface inspection system with a minimal number of optical devices to determine the presence and type of scatterers on a surface by analyzing the anisotropy of scattered light, using numerical analysis to present optimal inspection conditions for detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a simple configuration with a small number of optical devices is used, then the device complexity is reduced, but the ability to determine the type of defect is lost
Solution Approach 1:
The patent transitions from spatial arrangement of multiple optical devices to analyzing the angular distribution dimension of scattered light. By measuring scattered light intensity at multiple angles using minimal optical devices, the system extracts dimensional information about defect characteristics, enabling defect type determination without increasing device complexity
Solution Approach 2:
The patent changes the measurement parameter from simple light presence/absence to scattered light intensity distribution across different angles. By analyzing how scattering intensity varies with angle, the system can distinguish between different defect types (e.g., scratches, pits, particles) using a simple optical configuration
2Measurement precision
If a complex configuration with a large number of optical devices is used, then the defect type can be determined, but the device complexity increases
Solution Approach 1:
The patent segments the measurement function into two parts: a simple optical system for collecting scattered light and a computational analysis system for processing angular distribution data. This segmentation allows the optical hardware to remain simple while achieving accurate defect type determination through sophisticated data analysis of the scattered light patterns
3Device complexity
If a single light source is used, then the device complexity is reduced, but the defect type cannot be determined
Solution Approach 1:
The patent recovers lost defect type information by measuring scattered light in the angular dimension. Instead of using multiple light sources, a single light source illuminates the sample and the angular distribution of scattered light is measured, providing sufficient information to determine defect types through analysis of scattering patterns at different angles
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Efficiently determines the presence and type of scatterers on a surface using a small number of optical devices, enabling accurate defect identification on semiconductor wafers and flat metals.
Implementation Method 1
scattered light when inspection light, such as laser light or the like, is irradiated on the surface of the inspection target
Data Source
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AI summary
To present an inspection condition for efficiently detecting a scatterer present on a surface of an inspection target depending on type. An inspection condition presentation apparatus includes an intensity calculation part configured to calculate an intensity distribution of scattered light when inspection light is irradiated on a surface of an inspection target on which scatterers of different types are present according to a plurality of incidence condition candidates, and an incidence condition presentation part configured to present, to a user, an incidence condition candidate with which an intensity of the scattered light becomes a maximum.