Surface-Emitting Laser Conductive Layer Venting for Higher Yield
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Solution Overview
Problem
Conventional surface emitting laser apparatuses have limitations in yield improvement due to issues related to gas swelling and reliability, particularly in the conductive layer and electrode units.
Innovation Solution
The surface emitting laser apparatus incorporates a conductive layer with specific portions covering the light emission unit and electrode unit, including a degassing unit such as openings, notches, or thin films, to facilitate gas discharge and improve yield and reliability by preventing gas swelling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conductive layer is formed to make the light emission unit and electrode unit conductive, then electrical connectivity is improved, but gas swelling occurs reducing yield
Solution Approach 1:
The conductive layer is segmented into multiple portions (first portion covering region between light emission unit and electrode unit, second portion covering near half part of electrode unit, third portion covering far half part of electrode unit). This segmentation allows strategic placement of degassing units at specific locations within the conductive layer structure, enabling gas discharge while maintaining electrical connectivity in critical areas.
Solution Approach 2:
Degassing units are introduced as intermediary structures within the conductive layer. These degassing units (openings, notches, or thin films) serve as mediators that allow gas to escape from the oxidized constriction layers without compromising the overall electrical connectivity of the conductive layer, thus resolving the conflict between maintaining conductivity and preventing gas swelling.
2Manufacturing precision
If oxidized constriction layers are formed in the light emission unit and electrode unit, then current confinement is improved, but gas generation occurs causing swelling
Solution Approach 1:
The oxidized constriction layers that generate harmful gas are strategically positioned, and degassing units are placed to convert the harmful gas generation into a beneficial degassing mechanism. The oxidation process is necessary for current confinement, but the associated gas generation is converted into a controlled degassing function through the strategically placed degassing units, transforming a harmful effect into a useful one.
Solution Approach 2:
Different regions of the conductive layer are given different qualities and functions. The first portion maintains electrical connectivity, the second portion (covering near half part of electrode unit) includes degassing units for gas discharge, and the third portion provides additional structural support. This local differentiation allows each region to optimize its specific function while collectively solving the gas swelling problem.
3Reliability
If the conductive layer covers the entire electrode unit, then electrical connectivity is maximized, but gas accumulation increases
Solution Approach 1:
The conductive layer is divided into three distinct portions with different functions. The first portion maintains electrical connectivity between light emission unit and electrode unit, while the second and third portions include degassing units that enable gas accumulation to be released. This segmentation allows the conductive layer to simultaneously achieve electrical connectivity and gas discharge functions.
Solution Approach 2:
The conductive layer incorporates porous or open structures in the form of degassing units (openings, notches, or thin films) within the second and third portions. These porous structures allow gas to pass through the conductive layer, preventing gas accumulation while maintaining electrical connectivity in the first portion that covers the critical interface region.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the yield and reliability of the surface emitting laser apparatus by effectively discharging gases through the degassing units, reducing defects and improving the manufacturing process efficiency.
Implementation Method 1
a first selective oxidized layer 103S and a second selective oxidized layer 103S′
Implementation Method 2
a degassing unit 113-1a is provided in the first portion P1 and/or the second portion P2 and the third portion P3. The degassing unit 113-1a may be an opening, a notch, or a thin film.
Data Source
AI summary
Provided is a surface emitting laser apparatus capable of improving the yield.The present technology includes: a stacked structure having at least one light emission unit including a first oxidized constriction layer and an electrode unit including a second oxidized constriction layer at different positions in an in-plane direction; and a conductive layer that makes the light emission unit and the electrode unit conductive with each other, in which the conductive layer includes a first portion covering a region between the light emission unit and the electrode unit, a second portion covering a near half part of the electrode unit, the near half part being relatively close to the light emission unit, and a third portion covering a far half part of the electrode unit, the far half part being relatively far from the light emission unit, in the stacked structure, and a degassing unit is provided in the first portion and/or the second portion and the third portion.