Surface-Emitting Laser Tunnel Junction Layout for High Output

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Solution Overview

Problem

The existing manufacturing processes for surface emitting lasers with buried tunnel junctions are costly due to the repeated etching and burial regrowth required for each tunnel junction layer, which increases the complexity and expense of producing high-output lasers.

Innovation Solution

The surface emitting laser design incorporates a laminated structure with semiconductor structures that include active layers and tunnel junction layers, where the peripheral parts of the tunnel junction layers have higher resistance than the center parts, achieved through ion implantation, thereby eliminating the need for repeated etching and burial regrowth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If repeated etching and burial regrowth are performed for each tunnel junction layer to achieve high output, then the laser output is improved, but the manufacturing cost and process complexity increase

Engineering Contradiction:
Improvelaser outputVSAvoidmanufacturing cost
Core Design Contradiction:
PowerVSEase of manufacture

Solution Approach 1:

Multiple tunnel junction layers are laminated together to form a single integrated middle part structure, eliminating the need for separate etching and burial regrowth processes for each tunnel junction layer. This merging approach maintains the current constriction function while significantly reducing manufacturing steps and costs.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The laminated tunnel junction layers collectively serve as a unified current constriction region that functions equivalently to multiple individual buried tunnel junctions, providing the same laser output enhancement without requiring repeated complex processing steps.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Power

If repeated etching and burial regrowth are performed for each tunnel junction layer to achieve high output, then the laser output is improved, but the manufacturing process complexity increases

Engineering Contradiction:
Improvelaser outputVSAvoidmanufacturing process complexity
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

Multiple tunnel junction layers are combined into a single laminated structure that is processed as one unit, reducing the number of discrete etching and regrowth cycles required while maintaining the functional equivalence of multiple buried tunnel junctions.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If peripheral parts of tunnel junction layer have higher resistance than center part, then current constriction is achieved, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvecurrent constrictionVSAvoidprocessing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The tunnel junction layers are designed with spatially varying resistance characteristics, where the peripheral parts have higher resistance than the center parts. This local quality differentiation achieves effective current constriction without requiring complex processing, as the resistance variation is inherent to the laminated structure design.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the production of high-output surface emitting lasers while significantly reducing manufacturing costs and simplifying the process, as the current constriction region is achieved without the need for complex tunnel junction layer processing.

Implementation Method 1

achieved through ion implantation

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentUS20250141187A1Surface emitting laser and manufacturing method for surface emitting laser
Publication Date: 2025.05.01 SONY GROUP CORP
  • US20250141187A1 patent drawing
  • US20250141187A1 patent drawing
  • US20250141187A1 patent drawing

AI summary

The present technology provides a surface emitting laser that can achieve a high output while suppressing an increase in manufacturing cost, and includes a current constriction region.The surface emitting laser according to the present technology includes: first and second reflection mirrors that are mutually laminated; and a middle part that is disposed between the first and second reflection mirrors, the middle part has a laminated structure formed by laminating a plurality of semiconductor structures including each of a mutually laminated active layer and tunnel junction layer as an intermediate layer, and a peripheral part of at least the tunnel junction layer of the at least one semiconductor structure has higher resistance than resistance of a center part. The surface emitting laser according to the present technology can provide the surface emitting laser that can achieve a high output while suppressing an increase in manufacturing cost, and includes a current constriction region.