Object Surface Location Determination Using Probability Analysis
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Solution Overview
Problem
Existing methods for determining the location of an object surface, such as semiconductor lithography substrates, are prone to errors due to incorrect determination of grating deviations, leading to inaccuracies in positioning and critical dimension measurements.
Innovation Solution
A method that uses probability analysis to determine the location of an object surface by weighting measured values, allowing for the exclusion of incorrect measurements and improving the accuracy of positioning and subsequent measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple measured values are used to determine the location of the object surface, then the measurement precision is improved, but the reliability deteriorates due to the possibility of incorrect measurements
Solution Approach 1:
The patent implements feedback by using the probability analysis results to iteratively refine the selection of measured values. The system evaluates the probability of each measured value being correct, excludes unlikely values, and uses the refined set for location determination, creating a feedback loop that improves both precision and reliability
Solution Approach 2:
The patent changes the parameter of measured value selection from a fixed deterministic approach to a probabilistic approach. By introducing probability thresholds and dynamically adjusting which measured values are considered valid, the system resolves the contradiction between using multiple values for precision while maintaining reliability
2Manufacturing precision
If the accuracy of object surface positioning is improved, then the manufacturing precision is improved, but the productivity decreases due to the need for repeated measurements
Solution Approach 1:
The patent applies preliminary action by performing probability analysis and filtering of measured values before the actual location determination. This preliminary filtering ensures that only high-probability measured values are used, reducing the need for repeated measurements and improving both positioning accuracy and productivity
Solution Approach 2:
The patent replaces the mechanical approach of repeated physical measurements with a probabilistic filtering system. Instead of mechanically repeating measurements to ensure accuracy, the system uses probability analysis to identify and select the most reliable measured values from a single set of measurements, thereby improving productivity while maintaining precision
Data Source
AI summary
Disclosed is a method for determining a location of an object surface (16) in relation to a target location in a measuring device for semiconductor technology, the location being determined on the basis of at least two measured values which represent the location, wherein the determination of the location comprises a probability analysis.