Surface Potential Measurement Using Charged Particle Beam Scanning
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Solution Overview
Problem
Conventional technologies face challenges in measuring surface potential distribution on photoconductors with high resolution, particularly in the micron order, due to limitations in space resolution and the inability to maintain charge over extended periods, which affects the evaluation of electrostatic latent images in image forming apparatuses.
Innovation Solution
A surface-potential distribution measuring apparatus that uses a beam of charged particles to scan the sample surface, emitting secondary charged particles and detecting them to calculate the potential distribution, allowing for high-resolution measurement of surface potential and charge distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electron beam scanning is used to observe electrostatic latent image, then observation capability is achieved, but measurement time increases causing charge disappearance on photoconductors
Solution Approach 1:
The patent replaces conventional electron beam scanning with a charged particle beam system that operates more efficiently. The beam generating unit produces a focused charged particle beam that rapidly scans the sample surface, and the detection unit quickly detects secondary charged particles. This reduces measurement time significantly, preventing charge disappearance on photoconductors while maintaining observation capability.
Solution Approach 2:
The patent changes the beam parameters by using a charged particle beam with optimized characteristics. The beam generating unit creates a beam with appropriate energy and focus, and the optical system adjusts beam parameters to achieve rapid scanning. This parameter optimization reduces measurement time while maintaining measurement precision, resolving the contradiction between observation capability and measurement time.
2Adaptability or versatility
If photoconductor is used as sample, then electrostatic latent image formation is achieved, but charge holding capability deteriorates over time
Solution Approach 1:
The patent replaces conventional measurement systems with a charged particle beam system that operates rapidly. The beam generating unit creates a focused charged particle beam that scans the sample surface quickly, and the detection unit detects secondary charged particles in real-time. This rapid measurement approach captures the electrostatic latent image before charge disappears from the photoconductor, maintaining both image formation capability and effective measurement window.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement of surface potential and charge distribution with improved resolution, enabling better evaluation of electrostatic latent images and enhancing the quality of output images in image forming apparatuses.
Implementation Method 1
a surface-potential distribution measuring apparatus that measures potential distribution on a surface of a sample by scanning the surface with a beam of charged particles
Implementation Method 2
an optical system that is located between the beam generating unit and the sample, and focuses the beam from the beam generating unit to the surface of the sample
Implementation Method 3
a particle emitting member that is located near the sample to be collided with at least part of the charged particles via the sample, and emits secondary charged particles corresponding to number of collided charged particles
Implementation Method 4
a detecting unit that detects at least part of the secondary charged particles
Data Source
AI summary
A surface-potential distribution measuring apparatus includes an electron gun, an electron-beam optical system, an electron-emission panel, a detector, and a control system. The electron-beam optical system is located between the electron gun and a sample, and focuses a beam of electrons emitted from the electron gun to the surface of the sample. The electron-emission panel is located near the sample to be collided with at least part of the electrons via the sample, and emits secondary electrons corresponding to the number of collided electrons. The detector detects at least part of the secondary electrons. The control system obtains potential distribution on the surface of the sample based on a detection result obtained by the detector.