Surface Shape Measuring Device Vibration Compensation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Scanning-type surface shape measuring devices experience measurement errors due to vibration, which causes displacement in the relative positional relationship between the microscope and the measurement target, and frame drop in the camera, leading to inaccurate results.
Innovation Solution
A surface shape measuring device that includes a camera, a drive unit for scanning the optical head relative to the measurement target, an encoder for position detection, and a system to calculate and adjust the frame dropping occurrence rate, allowing for dynamic adjustment of measurement conditions such as field of view and scanning speed to minimize the impact of vibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the optical head scans at high speed to improve productivity, then measurement efficiency increases, but vibration causes frame dropping and measurement errors
Solution Approach 1:
The patent implements dynamic adjustment of scanning speed based on real-time vibration detection. The system continuously monitors vibration levels during scanning and automatically adjusts the scanning speed to maintain optimal measurement conditions, transforming a static scanning process into a dynamic adaptive one that balances speed and accuracy
Solution Approach 2:
The system employs feedback control by detecting vibration levels during scanning and using this information to adjust scanning parameters. The vibration detection unit provides real-time feedback to the control unit, which then modifies the scanning speed to prevent frame dropping while maintaining measurement efficiency
2Loss of time
If the scanning speed is increased to reduce measurement time, then productivity improves, but frame dropping occurs due to vibration
Solution Approach 1:
The system performs preliminary vibration detection and analysis before initiating high-speed scanning. By pre-assessing vibration conditions and setting appropriate scanning speeds in advance, the system prevents frame dropping before it occurs, ensuring both time efficiency and reliability
Solution Approach 2:
The patent dynamically changes scanning parameters including speed and acceleration based on detected vibration characteristics. The system adjusts these parameters in real-time to optimize the balance between measurement speed and frame capture reliability, preventing time loss due to re-scanning
3Measurement precision
If vibration compensation measures are implemented to improve measurement accuracy, then measurement precision improves, but device complexity increases
Solution Approach 1:
The patent introduces a vibration detection unit as an intermediary component that senses vibration and triggers appropriate compensation actions. This mediator approach allows the system to achieve vibration compensation without requiring complete redesign of the scanning mechanism, thereby limiting the increase in device complexity
Solution Approach 2:
The system replaces complex mechanical vibration isolation mechanisms with a sensor-based detection and control approach. By using vibration detection units and software-based compensation algorithms, the patent achieves measurement precision improvement without the mechanical complexity of passive isolation systems
Data Source
AI summary
A surface shape measuring device includes a camera that captures the observation image acquired by the optical head, a drive unit that causes the optical head to scan relatively in a scanning direction perpendicular to the measurement target, an encoder for detecting a position of the optical head in the scanning direction with respect to the measurement target, an imaging instructing unit that instructs the camera to capture the observation image based on a position signal output from the encoder for each predetermined interval, a frame dropping occurrence rate calculating unit that calculates a frame dropping occurrence rate indicating an occurrence rate of frame dropping of the camera, and a measurement condition setting unit that sets a measurement condition for measuring a surface shape of the measurement target based on the frame dropping occurrence rate.