Surface Stress Sensor Receptor Layer Cleaning by Thin-Film Heating
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Solution Overview
Problem
Surface stress sensors face challenges in accurately measuring subsequent samples due to residual components from previous measurements adsorbed on the receptor layer, leading to measurement history influences that affect accuracy and stability, and existing cleaning methods are complex and inefficient, especially for non-specialists, and may require additional heating elements that increase sensor thickness and cost.
Innovation Solution
A method involving the generation of heat within the silicon thin membrane of the surface stress sensor by flowing current through its piezoresistive portions or using radiant heat from an external source to desorb substances from the receptor layer, allowing for efficient cleaning without structural modifications or increased heat capacity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If cleaning is performed by supplying reference fluid or cleaning fluid to desorb substances from the receptor layer, then measurement history influence is reduced, but cleaning process becomes complicated and time-consuming
Solution Approach 1:
The patent replaces the mechanical/chemical cleaning system (supplying large volumes of reference fluid or cleaning solvents) with a thermal field system. By supplying heat to the receptor layer, adsorbed substances are desorbed through thermal energy, eliminating the need for complex fluid supply systems and large volumes of cleaning fluids.
Solution Approach 2:
The patent changes the physical parameter used for cleaning from chemical (solvent properties) to thermal (temperature). By controlling the temperature of the receptor layer, the cleaning process becomes simpler and more controllable, avoiding the complexity of selecting and managing various cleaning solvents.
2Reliability
If additional heating elements are added to the sensor structure to enable heating cleaning, then cleaning effectiveness is improved, but sensor thickness and manufacturing cost increase
Solution Approach 1:
The patent makes the receptor layer itself serve dual functions: as the sensing element for detecting surface stress changes and as the heating element for cleaning. By supplying heat directly to the receptor layer through its substrate or support structure, the system eliminates the need for separate heating elements, maintaining manufacturing simplicity while achieving effective cleaning.
Solution Approach 2:
The patent merges the cleaning function with the existing sensor structure. The receptor layer, which is already present in the sensor, is utilized as the target for heat supply during cleaning, combining the sensing structure and cleaning target into a single integrated component rather than adding separate heating elements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables rapid and effective cleaning of the receptor layer, maintaining sensor integrity and measurement accuracy while avoiding structural complications and cost increases, allowing for efficient detection of surface stress changes without the need for additional components.
Implementation Method 1
causing at least a part of a surface region of the thin film to generate heat... the silicon thin membrane may be caused to generate heat by flowing a current through at least a part of the silicon thin membrane
Implementation Method 2
a component in the target fluid to be measured adsorbed on the receptor layer... is not completely desorbed from the receptor layer
Data Source
AI summary
A method for cleaning a receptor layer of a surface stress sensor according to an embodiment of the present invention includes, in a surface stress sensor that detects a change in surface stress of a thin film, the change being caused by a receptor layer disposed on a surface of the thin film, causing at least a part of a surface region of the thin film to generate heat or supplying heat to the receptor layer from the outside of the surface stress sensor. This makes it possible to easily perform efficient cleaning of a surface stress sensor such as a sensor that performs detection using a piezoresistor while avoiding structural complications as much as possible.