Surface Texture Material Measure with Parallel Grooves
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Solution Overview
Problem
Current methods for evaluating the performance of surface texture measuring instruments require multiple measurements with varying groove widths, leading to increased working time and workload, as the response characteristic is checked by sequentially scanning multiple material measures with different groove dimensions.
Innovation Solution
A material measure with a measurement area featuring grooves of constant depth and varying widths, allowing for the evaluation of a measuring instrument's performance by scanning once in parallel, reducing the need for multiple measurements and simplifying the processing method using monocrystal silicon or other materials like stainless steel and glass.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple material measures with different groove widths are prepared to evaluate response characteristic, then measurement accuracy can be checked across varying widths, but working time and workload increase due to sequential scanning requirements
Solution Approach 1:
The patent combines multiple groove structures with different widths into a single material measure. The measurement surface includes grooves of varying widths (e.g., W1, W2, W3) all in the same field of view, allowing the measuring instrument to evaluate response characteristics across different groove widths through a single scan, eliminating the need to sequentially measure multiple separate material measures.
Solution Approach 2:
The invention transitions from evaluating different material measures in sequence (temporal dimension) to evaluating multiple groove widths simultaneously within a single field of view (spatial dimension). This allows parallel assessment of response characteristics across varying groove widths by capturing all groove types in one measurement area.
2Measurement precision
If multiple material measures with different groove widths are prepared to evaluate response characteristic, then measurement accuracy can be checked across varying widths, but workload increases due to multiple measurement procedures
Solution Approach 1:
The patent combines multiple groove structures with different widths into a single material measure. The measurement surface includes grooves of varying widths (e.g., W1, W2, W3) all in the same field of view, allowing the measuring instrument to evaluate response characteristics across different groove widths through a single scan, eliminating the need to sequentially measure multiple separate material measures.
3Productivity
If grooves of constant depth and varying widths are arranged in parallel, then working time is reduced through single-scan evaluation, but device complexity increases due to precise groove arrangement requirements
Solution Approach 1:
The measurement surface is segmented into multiple groove structures with different widths (W1, W2, W3, etc.) that are arranged in parallel. Each groove maintains a constant depth while varying in width, allowing the measuring instrument to simultaneously evaluate response characteristics across different groove widths through a single scan, thus improving productivity without requiring complex three-dimensional variations.
Data Source
Figure 1A~1D
Figure 2A~2F
Figure 3A~3B
AI summary
A material measure for use in evaluating the performance of a measuring instrument for measuring surface texture includes: a measurement area having a plurality of grooves in a predetermined direction. With the configuration, each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction; and a length of the cross-sectional shape in the predetermined direction is different for the predetermined number of adjacent grooves in the predetermined direction.