Surface Texture Probe with Equiangular Beam Support
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Solution Overview
Problem
Conventional surface texture measuring probes in near-field scanning optical microscopes suffer from low measurement speed and accuracy due to disturbance vibrations, which are exacerbated by the natural frequency limitations of cantilever structures.
Innovation Solution
A surface texture measuring probe design featuring a probe head supported by multiple equiangular beams and a vibration element between two supporting bodies, allowing for axial vibration at frequencies lower than the natural frequency, which enhances measurement speed and accuracy by using a dynamic vibration absorber configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a cantilever structure with holder base is used for the probe, then the probe can be supported and positioned, but the natural frequency cannot be heightened and disturbance vibration affects measurement accuracy
Solution Approach 1:
The probe structure is segmented into a probe head and a supporting body as separate components. The probe head contains the actual measurement tip while the supporting body provides structural support and vibration isolation. This segmentation allows the probe head to be lightweight and responsive while the supporting body can be designed for stability and low natural frequency of disturbance vibration.
2Productivity
If the probe is vibrated at frequency higher than natural frequency for faster measurement, then response speed increases, but the probe oscillates due to resonance and measurement accuracy deteriorates
Solution Approach 1:
The natural frequency of the probe system is changed through modification of the supporting body structure. By designing the supporting body with specific stiffness and mass characteristics, the natural frequency is adjusted to be lower than the measurement excitation frequency, preventing resonance oscillation while enabling fast measurement response.
3Ease of operation
If the cantilever probe structure is used, then the probe can be anchored and positioned, but the control response speed cannot be increased and measurement cannot be speeded up
Solution Approach 1:
The probe system transitions from a static cantilever structure to a dynamic system where the probe head and supporting body have controlled relative motion characteristics. The supporting body is designed to minimize its natural frequency while the probe head maintains high responsiveness, enabling dynamic measurement operation at higher speeds without sacrificing positioning control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables higher frequency excitation and reduced disturbance vibrations, resulting in faster and more accurate surface texture measurements without affecting optical properties, thus improving the measurement speed and precision.
Implementation Method 1
the vibration element is vibrated with the first and second supporters of the first and second supporting bodies fixed. As the vibration element vibrates, the probe head is vibrated in the axial direction
Implementation Method 2
the laser beam is irradiated on the tip end of the probe head, so that a near-field light is formed at the tip end
Implementation Method 3
the near-field light formed at the tip end of the probe head is scattered by the workpiece, thereby detecting the scattered light by the detection element
Data Source
AI summary
A surface texture measuring probe (60) includes a probe head (65), a first supporting body (61), a second supporting body (62), a piezoelectric element (63) and a balancer (64). The first supporting body includes a first supporter (611) having an inner space, and a plurality of beams (613) respectively extending from equiangular arrangement positions of the first supporter toward the center and supporting the probe head (65) at the tip end thereof. The second supporting body (62) includes a second supporter (621) and a holder (622) supported by a plurality of beams (623) respectively extending from equiangular arrangement positions of the second supporter towards the center. The piezoelectric element (63) is disposed between the probe head and the holder, and formed to vibrate in an axial direction.