Surface-Treated Shower Plate for Plasma CVD Corrosion Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional plasma CVD apparatuses experience changes in film characteristics, such as increased film thickness and reduced elastic modulus, due to corrosion and thermal issues at metal contact surfaces between the shower plate and body, affecting the reliability of high-integration devices.
Innovation Solution
A plasma CVD apparatus with a showerhead featuring a surface-treated peripheral surface to eliminate metal-to-metal contact, providing corrosion resistance and stabilizing film characteristics by controlling the effects of fluorinated radicals and thermal conductivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If metal-to-metal contact surfaces are used between shower plate and body, then electrical conductivity and RF wave propagation are maintained, but corrosion occurs and film characteristics change
Solution Approach 1:
The patent introduces a non-metallic material (such as PTFE or other insulating materials) as an intermediary layer between the metal shower plate and body. This intermediary prevents direct metal-to-metal contact, thereby eliminating corrosion while maintaining electrical conductivity and RF wave propagation through proper material selection and design.
Solution Approach 2:
The patent employs composite material structures where non-metallic components are integrated with metallic parts. The contact surfaces utilize composite construction that combines the benefits of metal (structural integrity) with non-metal materials (corrosion resistance), creating a hybrid interface that resolves the contradiction between conductivity and corrosion resistance.
2Ease of manufacture
If conventional showerhead structure is used, then maintenance is simple and costs are reduced, but film thickness increases and elastic modulus decreases during consecutive deposition
Solution Approach 1:
The patent divides the showerhead into separable components (shower plate, body, and intermediary layers) that can be independently maintained or replaced. This segmentation allows for easier maintenance while preventing the degradation issues that affect film thickness control in conventional integrated structures.
3Productivity
If metal contact surfaces are exposed to fluorinated radicals, then cleaning process is effective, but contact surfaces become corroded and rough
Solution Approach 1:
The non-metallic intermediary material serves as a protective mediator that shields the metal contact surfaces from direct exposure to corrosive fluorinated radicals during cleaning processes. This allows effective cleaning to occur while the intermediary absorbs or resists the corrosive effects, preserving contact surface integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The surface-treated peripheral surfaces stabilize film thickness and elastic modulus, preventing changes during consecutive deposition processes and ensuring reliable film formation without interfering with electric current or radio-frequency propagation.
Implementation Method 1
at least one of the peripheral surface of the body or the peripheral surface of the shower plate is surface-treated
Implementation Method 2
The showerhead 9 and the gas inlet port 5 are insulated from the reaction chamber 6, are connected with radio-frequency sources 7, 8 and form the other side of the electrodes
Implementation Method 3
The susceptor 3 is supported by a heater 2 which heats the substrate 4 to a given temperature (150-450° C.)
Data Source
AI summary
A plasma CVD apparatus includes a showerhead comprised of a body having a hollow structure. The shower plate is detachably integrated with the body at a peripheral surface of the body and a peripheral surface of the shower plate, and at least one of the peripheral surface of the body or the peripheral surface of the shower plate is surface-treated.