Surface Treating Apparatus Airflow Inversion for Temperature Uniformity
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Solution Overview
Problem
Surface treatment processes, such as plating, face issues with temperature differences between the upper and lower portions of a substrate during treatment, leading to nonuniform treatment and potential defects due to varying temperatures of the treatment solution, which affect adhesion and deposition thickness.
Innovation Solution
A surface treating apparatus with an air intake in the upper portion and an air discharging port in the lower portion to maintain uniform air temperature, along with a treatment solution releasing section that avoids splattering onto adjacent bodies, stabilizes the substrate and maintains temperature consistency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the upper portion of the body is open to allow treatment solution to flow down, then the treatment solution can be discharged and collected, but warm air is discharged and causes temperature difference between upper and lower portions
Solution Approach 1:
The patent inverts the conventional air flow direction by placing the air intake at the lower portion and air discharge at the upper portion of the body. This reversal creates a counter-flow effect where cool air enters at the bottom and rises to meet the warm air discharge at the top, reducing temperature differences between upper and lower portions while maintaining treatment solution discharge efficiency.
2Object-affected harmful factors
If the upper portion is covered to prevent dust contamination, then contamination is reduced, but air circulation is restricted and temperature difference increases
Solution Approach 1:
The patent introduces air intake and discharge ports as intermediary elements that mediate between the need for a covered body (to prevent dust contamination) and the need for air circulation (to maintain temperature uniformity). These ports allow controlled air exchange without requiring the body to be open, thus preventing dust contamination while maintaining temperature uniformity through proper air flow management.
3Manufacturing precision
If treatment solution is ejected onto the substrate, then surface treatment is achieved, but temperature difference between upper and lower substrate portions causes nonuniform treatment
Solution Approach 1:
The patent implements a feedback mechanism where air temperature and flow are actively controlled through strategically positioned intake and discharge ports. This feedback system monitors and adjusts the air environment to maintain uniform temperature across the substrate, ensuring consistent surface treatment quality by compensating for temperature variations that would otherwise cause nonuniform treatment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces temperature differences between the upper and lower substrate portions, enhancing treatment uniformity, preventing defects, and improving adhesion and deposition consistency.
Implementation Method 1
an air intake is provided in an upper portion of the body, and an air discharging port is provided in a lower portion of the body
Data Source
AI summary
A surface treating apparatus that suppresses occurrence of defects is provided. A treatment solution is accumulated in a tank 15 through a treatment solution collecting port/air discharging port 13 in a lower portion of a body 4. An air heated by the treatment solution flows toward an upper portion (portion without the treatment solution) of the tank 15 via the treatment solution collecting port/air discharging port 13 in the lower portion of the body 4, and is discharged via an exhaust duct 17. In this way, the air that is heated and tends to flow upward in the body 4 is discharged from the lower portion thereof and is replaced with an external air from the upper portion thereof. Accordingly, the air in the body 4 can be maintained at a uniform temperature. Thus, the treatment solution that reaches a lower portion of a substrate 54 from an upper portion thereof can be maintained at a uniform temperature. The air is caused to flow toward the lower portion from the upper portion in the body 4, so that the substrate 54 is pulled downward, and swinging of the substrate 54 can thus be reduced. Therefore, the substrate 54 can be less likely to contact an inlet 44 and an outlet 46.