Surface Treatment Layout for Combined Sputtering and Plasma Processing
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Solution Overview
Problem
Existing surface treatment apparatuses are not suitable for small-scale to medium-scale production, as they are designed for large-scale production and lack the capability to perform multiple surface treatments like sputtering and plasma treatment simultaneously.
Innovation Solution
A surface treatment apparatus with a mounting device, housing unit, conveyance device, and adjustment devices that allow for the conveyance and orientation adjustment of workpieces, enabling the performance of sputtering and plasma treatments on a single apparatus, suitable for small to medium-scale production.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a film formation apparatus with a large scale is used to perform surface treatment of a large amount of workpieces, then the productivity is improved, but the device complexity increases and it becomes unsuitable for small-scale to medium-scale production
Solution Approach 1:
The apparatus segments the surface treatment process into distinct functional zones: a sputtering treatment zone with a sputtering treatment unit and a plasma treatment zone with a plasma treatment unit. The conveyance device moves workpieces through these segmented zones sequentially, allowing each zone to be optimized independently while maintaining overall system efficiency for small to medium-scale production
Solution Approach 2:
The single apparatus integrates multiple surface treatment functions by combining both sputtering and plasma treatment units within one housing unit. This multi-functional design allows the same apparatus to perform different types of surface treatments on workpieces without requiring separate dedicated equipment, making it suitable for small to medium-scale production while maintaining versatility
2Adaptability or versatility
If different kinds of surface treatment such as sputtering and plasma treatment are performed by one apparatus, then the adaptability is improved, but the device complexity increases
Solution Approach 1:
The apparatus divides different surface treatment functions into separate treatment units: a sputtering treatment unit for sputtering operations and a plasma treatment unit for plasma operations. Each unit is independently configured within the housing, allowing different treatment types to coexist without interfering with each other, thus managing complexity through functional segmentation
Solution Approach 2:
The apparatus employs a conveyance device that dynamically moves workpieces between different treatment zones and adjusts the orientation of workpieces using an adjustment device. This dynamic positioning allows the same apparatus to adaptively apply different treatment types (sputtering or plasma) to different surfaces of workpieces, enhancing versatility while maintaining a relatively simple fixed structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus efficiently performs surface treatments on small to medium-sized workpieces, ensuring uniform film formation and improved adhesion of thin films, while reducing production cycle time and vacuuming time, and enhancing cost performance.
Implementation Method 1
a surface treatment apparatus that forms a thin film on a surface of a workpiece by using a sputtering apparatus
Implementation Method 2
a surface treatment apparatus that forms a metal catalyst layer, a SiOx film, or the like by using plasma to clean or modify a surface of a workpiece
Data Source
AI summary
A surface treatment apparatus includes a mounting device, a housing unit, a surface treatment device, a conveyance device, and a first adjustment device. A workpiece is mounted on the mounting device. The housing unit houses the workpiece mounted on the mounting device. The surface treatment device performs at least one kind of surface treatment on the workpiece housed in the housing unit. The conveyance device conveys the workpiece mounted on the mounting device along the surface treatment device. The first adjustment device adjusts an orientation of the workpiece according to a conveyance position by the conveyance device and a position of the surface treatment device.