Surface Wave Resonator Readout for Dense Sensor Arrays
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Solution Overview
Problem
Current NEMS-based sensors face limitations in forming dense two-dimensional arrays of mechanical resonators due to spatial constraints from electrical leads, and optical measurement methods like laser scanning interferometry are difficult to integrate and cannot measure multiple resonators simultaneously.
Innovation Solution
A sensor device utilizing piezoelectric carrier material with interdigital transducers (IDTs and IDTe) and mechanical resonators (MRs) that operate using surface acoustic waves, allowing for dense arrays and simultaneous electrical readout without optical technology.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical measurement methods like laser scanning interferometry are used to measure resonator displacement, then measurement capability is achieved, but device complexity increases and integration becomes difficult
Solution Approach 1:
The patent replaces optical measurement methods with electrical measurement methods. Instead of using laser scanning interferometry, the invention uses interdigital transducers to generate surface acoustic waves that mechanically excite the resonators, and the same or additional transducers detect the resonator response through electrical signals. This substitution eliminates the need for complex optical setups while maintaining measurement capability.
2Ease of operation
If electrical leads are placed close to resonators for readout, then electrical measurement is enabled, but the density of two-dimensional array arrangement is limited
Solution Approach 1:
The interdigital transducers serve multiple functions: they generate surface acoustic waves to excite the resonators and simultaneously detect the resonator responses through electrical measurements. This multi-functionality reduces the need for separate excitation and detection components, allowing resonators to be placed closer together without requiring additional space for separate electrical leads and measurement equipment.
Solution Approach 2:
The patent combines the excitation and detection functions into a single integrated system using interdigital transducers. The same transducer structure that generates surface acoustic waves also detects the mechanical response of resonators through electrical signal changes, eliminating the need for separate measurement equipment and reducing spatial requirements for each resonator.
3Productivity
If multiple individual mechanical resonators are arranged in a two-dimensional array, then measurement efficiency increases, but spatial constraints from electrical leads limit array density
Solution Approach 1:
The patent replaces traditional electrical lead connections with surface acoustic wave-based mechanical coupling. Surface acoustic waves propagate through the substrate to reach multiple resonators without requiring physical electrical connections to each resonator, enabling higher array density while maintaining the ability to address and measure individual resonators.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the formation of dense two-dimensional arrays of resonators and allows simultaneous electrical readout of multiple resonators, enhancing sensor efficiency and overcoming spatial limitations.
Implementation Method 1
If an electrical voltage is applied between the combs, the mechanical force generated (piezoelectric effect) causes a change in the length of the carrier material between each pair of prongs.
Implementation Method 2
surface acoustic waves (SAWs), which propagate through the carrier material surface and whose movement is transmitted to the resonators, causing them to vibrate mechanically
Implementation Method 3
The mechanical deflection of the resonators caused by the surface acoustic waves can be significantly stronger than the displacement fields of the surface acoustic waves due to resonance.
Data Source
AI summary
The invention relates to a sensor device which has a carrier material, in particular a piezoelectric carrier material. Furthermore, the sensor device comprises at least one interdigital transducer, which is configured as a transmitter (IDTs) and as a receiver (IDTe) and is arranged on the carrier material, or at least one interdigital transducer, which is configured as a transmitter (IDTs) and at least one interdigital transducer, which is configured as a receiver (IDTe) and is also arranged on the carrier material. The sensor device further comprises at least one mechanical resonator (MR), which is arranged on the carrier material at a distance A from the IDTs and at a distance B from the IDTe, wherein the sensor device is set up so that a surface wave emitted by the IDTs as a transmit signal causes the MR to vibrate mechanically and a surface wave emitted by the vibrating MR travels as a receive signal in the direction of the IDTe and triggers a measurement signal in the latter.