Surface X-Ray Inspection Using Total Reflection for Micron Contaminants
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Solution Overview
Problem
Current X-ray fluorescence methods struggle to detect foreign substances on the surface of inspection targets with high sensitivity due to low intensity ratios of generated fluorescent X-rays, which can lead to undetected defects in products like lithium ion batteries, potentially causing short-circuits or explosions during shipping.
Innovation Solution
An inspection apparatus and method utilizing an X-ray generation tube to emit X-rays that are totally reflected by the inspection target surface, allowing an X-ray detector to detect and process the characteristic X-rays from foreign substances, improving detection sensitivity and accuracy by reducing the intensity of fluorescent X-rays from the target material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If X-ray fluorescence method is used to detect foreign substances, then element specification is possible, but detection sensitivity is low due to low intensity ratio of fluorescent X-rays
Solution Approach 1:
The patent changes the measurement parameters by using Grazing Incidence X-ray Fluorescence (TXRF) instead of conventional XRF. This involves changing the incident angle of X-rays to a grazing angle (less than the critical angle for total external reflection), which fundamentally alters the interaction geometry between X-rays and the sample surface, thereby improving detection sensitivity for foreign substances.
Solution Approach 2:
The patent inverts the conventional XRF approach by using total external reflection geometry. Instead of measuring fluorescence from deep within the sample, the method detects fluorescence generated only at the surface layer where foreign substances exist, effectively reversing the measurement depth and improving surface contamination detection.
2Measurement precision
If conventional X-ray fluorescence is used, then element analysis is achieved, but foreign substance detection is hindered by scattering of incident X-rays
Solution Approach 1:
The patent changes the incident angle parameter to a grazing angle that is less than the critical angle for total external reflection. This parameter change causes the X-rays to be totally reflected at the sample surface rather than penetrating into the bulk material, thereby eliminating scattering from the substrate while maintaining fluorescence excitation of foreign substances on the surface.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively detects foreign substances with high sensitivity, preventing defects and ensuring product safety by distinguishing the material composition of foreign substances, even when they are micron-sized, thereby enhancing the reliability of inspection processes.
Implementation Method 1
an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam
Implementation Method 2
detecting, by an X-ray detector, X-rays emitted from a foreign substance existing on the inspection target surface and totally reflected by the inspection target surface
Data Source
AI summary
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.