Susceptor Bearing Gap Design for Thermal Management
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Solution Overview
Problem
In high-speed rotating susceptor configurations used for treating wafers, there is a challenge in maintaining the temperature of the susceptor near the bearing while ensuring adequate fitting strength between the bearing and the spindle.
Innovation Solution
A susceptor design featuring a bearing with a tapered shape and a gap in its sidewall that projects outward from the fitting surface, reducing the contact area and heat transfer between the bearing and spindle, thereby maintaining temperature and fitting strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the bearing is designed with a larger contact area with the spindle, then the fitting strength is improved, but the temperature of the susceptor near the bearing decreases due to excessive heat transfer
Solution Approach 1:
The bearing is designed with non-uniform thermal conductivity: the first region (near the spindle contact area) has lower thermal conductivity to reduce heat transfer and maintain temperature, while the second region (away from spindle) has higher thermal conductivity to ensure proper heat dissipation. This local differentiation resolves the contradiction between maintaining temperature and managing heat transfer.
Solution Approach 2:
The bearing is segmented into two distinct regions with different thermal conductivity characteristics. The first region focuses on thermal isolation from the spindle to maintain susceptor temperature, while the second region handles heat dissipation. This segmentation allows independent optimization of thermal properties in different zones, resolving the temperature-strength contradiction.
2Productivity
If the susceptor rotates at high speed, then the productivity is improved, but the fitting strength between bearing and spindle becomes critical and may be compromised
Solution Approach 1:
The invention changes the thermal conductivity parameter of the bearing material in different regions. By adjusting thermal conductivity rather than mechanical strength parameters, the bearing can maintain high-speed rotation capability while ensuring adequate fitting strength through optimized thermal-mechanical coupling properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively suppresses temperature lowering near the bearing while maintaining the necessary fitting strength between the susceptor and spindle, ensuring stable operation during high-speed rotation.
Implementation Method 1
A gap is formed in an side wall of the bearing such that the gap projects toward the outside of the bearing from a fitting surface between the bearing and the spindle
Implementation Method 2
a fitting strength between the bearing of the susceptor and the spindle is important
Data Source
AI summary
A bearing (12) being a recessed section that receives a spindle (20) is provided in a lower surface (10B) of a susceptor (10). The bearing (12) has a tapers from the lower surface (10B) towards an upper surface (10A). A gap (12B) is provided in an side wall (12A) of the bearing (12), further on the outside of the bearing (12) than a fitting surface (12X) between the bearing (12) and the spindle (20) in the horizontal direction. As a result, reduction in the fitting force between the susceptor bearing and the spindle can be suppressed and susceptor temperature reduction in the vicinity of the bearing can also be suppressed.