Susceptor CF Coating Seals Anodized Layer Cracks

The patent applies a CF coating specifically to the cracked regions of the anodized layer through plasma CVD processing. This localized treatment seals the cracks and prevents base metal exposure at critical areas while maintaining the overall structure of the anodized layer. The coating is selectively formed where needed to address the reliability issue without compromising the manufacturing precision achieved by the anodized layer.

The patent creates a composite structure by combining the anodized layer with a CF (fluorocarbon) coating. The anodized layer provides the primary protective barrier, while the CF coating fills and seals the cracks in the anodized layer. This composite approach integrates two different materials with complementary properties to simultaneously achieve both manufacturing precision and reliability.

The patent extracts and removes the harmful aluminum-containing gases generated from exposed base metal by introducing cleaning gas (such as CF4 or C2F6) to react with and eliminate the aluminum contamination. The plasma processing removes aluminum particles and prevents their deposition on substrates, effectively extracting the harmful elements from the system.

The patent converts the harmful aluminum-containing gases into beneficial byproducts by using fluorocarbon cleaning gas to react with the exposed aluminum. The reaction transforms aluminum particles into volatile aluminum fluoride compounds that can be easily removed, turning the contamination problem into a controlled chemical process that eliminates the harm.

The patent applies preliminary action by first forming the CF coating to seal the cracks in the anodized layer before substrate processing begins. This preventive measure eliminates the source of aluminum gas generation at the outset, so that subsequent cleaning gas exposure does not produce aluminum-containing contaminants. The cracks are sealed in advance to prevent the harmful reaction chain.

The patent applies preliminary anti-action by introducing the CF coating as a protective barrier before any contamination can occur. This coating prevents the cleaning gas from contacting the exposed base metal, thereby preemptively blocking the generation of aluminum-containing gases. The anti-action is taken in advance to neutralize the potential harmful interaction between cleaning gas and exposed aluminum.