Ceramic Susceptor Electrode Rod Coating for Low-Impedance RF Power
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Solution Overview
Problem
Existing semiconductor susceptor electrode rods experience increased impedance and oxidation due to the skin effect, leading to reduced power transmission efficiency, frequent short circuits, and decreased lifespan, especially in high-frequency applications.
Innovation Solution
A ceramic susceptor with an electrode rod having a base material made of Mo, W, or their alloys, coated with a metal nitride film such as AlCrN, designed to minimize impedance and resist oxidation, featuring a streamlined shape with a tapered portion to prevent sharp edges and reduce heat generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If Ni-based heat-resistant material is used for the electrode rod, then oxidation resistance is improved, but impedance increases due to the skin effect in high-frequency range
Solution Approach 1:
The electrode rod uses a composite structure combining Ni-based heat-resistant alloy material with a copper cladding layer. The Ni-based alloy core provides oxidation resistance and mechanical strength, while the copper cladding layer reduces impedance and skin effect in high-frequency applications. This composite material approach resolves the contradiction by integrating the advantages of both materials.
Solution Approach 2:
Different portions of the electrode rod have different material properties: the core maintains Ni-based alloy composition for oxidation resistance, while the outer surface is covered with copper for low impedance. This local differentiation of material quality allows each region to optimize its function - the core for chemical stability and the surface for electrical performance.
2Power
If the electrode rod operates in high-frequency range, then power transmission capability is improved, but skin effect causes increased impedance and heat generation
Solution Approach 1:
The copper cladding layer on the electrode rod surface specifically addresses high-frequency skin effect by providing a low-impedance pathway for RF current. The copper material's superior electrical conductivity at high frequencies reduces impedance and minimizes heat generation, enabling effective power transmission while mitigating the harmful skin effect.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides improved durability and longevity of the susceptor by maintaining low impedance and resisting oxidation, ensuring stable RF power transmission and reducing the risk of short circuits, thereby enhancing the yield and quality of semiconductor processing.
Implementation Method 1
A ceramic susceptor with an electrode rod having a base material made of Mo, W, or their alloys, coated with a metal nitride film such as AlCrN, designed to minimize impedance and resist oxidation
Implementation Method 2
the impedance of the electrode rod increases due to the skin effect in which the current flows along the surface of the electrode rod, and heat generation occurs
Implementation Method 3
featuring a streamlined shape with a tapered portion to prevent sharp edges and reduce heat generation
Data Source
AI summary
The present disclosure relates to a ceramic susceptor including a ceramic plate having an electrode disposed thereon, wherein the ceramic plate may include an electrode pad connected to the electrode and an electrode rod having one end connected to the electrode pad to supply power to the electrode, and the electrode rod may include an extension part connected to the electrode pad and a power connection part provided at an end of a tapered portion of the extension part.