Susceptor Leveling Using Air Flow Pattern Detection
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Solution Overview
Problem
Conventional methods for leveling susceptor heaters in semiconductor manufacturing are manual, tedious, and difficult due to tight and crowded spaces, making them inefficient and prone to errors.
Innovation Solution
A susceptor leveling system that includes a sensing system generating sensor output signals indicating air flow across the susceptor, and a controller detecting flow patterns to automatically adjust the susceptor's position for precise leveling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual leveling methods are used, then operators can directly adjust levelers, but the process becomes tedious and time-consuming due to tight and crowded spaces making access difficult
Solution Approach 1:
The patent replaces manual mechanical adjustment operations with an automated sensing and control system. Sensors detect the position and level of the susceptor, and a controller automatically adjusts the levelers based on sensor feedback, eliminating the need for manual intervention in tight spaces and significantly reducing leveling time
Solution Approach 2:
The system enables the susceptor leveling process to be self-regulating through automatic sensing and adjustment. The sensing system continuously monitors susceptor position and the controller autonomously makes corrections without requiring operator presence or manual adjustment, allowing the system to level itself
2Manufacturing precision
If manual leveling adjustments are made one by one with measurements after each adjustment, then precise control is possible, but the process becomes extremely tedious and prone to errors
Solution Approach 1:
The patent implements a closed-loop feedback system where sensors continuously measure susceptor position and level, and the controller uses this feedback to automatically adjust levelers. This eliminates the iterative manual measurement-adjustment cycle while maintaining high precision through continuous real-time monitoring and correction
Solution Approach 2:
The automated sensing and control system replaces the manual measurement and adjustment process, using electronic sensors and controllers to achieve precise leveling simultaneously across multiple points rather than sequential manual adjustments, thereby大幅提高 productivity while maintaining or improving precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables automated, precise, and efficient susceptor leveling, reducing manual intervention and improving processing accuracy in semiconductor manufacturing.
Implementation Method 1
a sensing system coupled to the susceptor and configured to generate a plurality of sensor output signals indicating air flow across the susceptor and sensing system
Data Source
AI summary
Various embodiments of the present technology may provide a susceptor and a sensing system coupled to the susceptor and configured to generate a plurality of sensor output signals indicating air flow across the susceptor and sensing system. A controller is connected to the sensing system and configured to detect a flow pattern on the susceptor based on the sensor output signals.