Susceptor Position Detection Under Blur and Low-Contrast Imaging

The patent applies preliminary action by performing edge detection and Hough transformation on captured images to extract position information before the image quality deteriorates further. The system processes images to detect edges and identify detection target portions through mathematical transformations, ensuring accurate position detection even when images are affected by hot air and reaction products. This preprocessing approach maintains measurement precision despite adverse environmental conditions in the substrate processing chamber.

The patent applies local quality by placing specific detection target portions at particular locations on the susceptor structure. Rather than uniformly distributing complex features throughout the susceptor, the invention strategically positions detection targets at key locations where they provide maximum rotational position information. This localized approach to quality enhancement allows accurate position detection while minimizing overall structural complexity. The detection targets are positioned to leverage the rotational motion characteristics of the susceptor without requiring complex modifications to the entire susceptor design.

The patent applies mechanics substitution by replacing conventional mechanical or simple optical detection methods with advanced image processing techniques. Specifically, the system uses edge detection algorithms and Hough transformation to automatically extract position information from captured images. This substitution of processing methods enables faster and more reliable detection under adverse conditions such as reduced contrast and noise from reaction products. The mathematical transformations process images more efficiently than conventional threshold-based methods, reducing detection time while improving reliability in the challenging substrate processing environment.