Susceptor Positioning System for Batch Chamber Alignment
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Solution Overview
Problem
Current methods for positioning and rotating susceptor assemblies in batch processing chambers are manual and time-consuming, requiring three hours to achieve the necessary parallelism between large diameter components, which changes with temperature and pressure, leading to inefficiencies in deposition processes.
Innovation Solution
A positioning system comprising a shaft with a susceptor assembly and a set of actuators that allow for precise multi-axis motion, including a bottom and top plate with slidably movable rods to adjust the susceptor's position and a spherical roller bearing for vacuum sealing, enabling precise alignment and rotation within tight clearances.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual positioning methods are used to align the susceptor assembly, then the alignment can be achieved, but the process takes approximately three hours which is time-consuming
Solution Approach 1:
The patent replaces manual mechanical positioning with an automated positioning system that uses actuators (such as piezoelectric actuators or voice coil actuators) to precisely control the relative position between the susceptor assembly and injector plate. This substitution of mechanical manual adjustment with automated actuation systems dramatically reduces alignment time from hours to minutes or seconds while maintaining or improving alignment precision.
Solution Approach 2:
The positioning system incorporates feedback mechanisms and control algorithms that enable the system to automatically adjust and maintain optimal alignment without continuous human intervention. The system can self-correct for thermal expansion, mechanical drift, and other variations that occur during the deposition process, thereby eliminating the need for repeated manual realignment.
2Productivity
If the susceptor temperature and chamber pressure change during processing, then the deposition process can be performed, but the parallelism between components changes requiring realignment
Solution Approach 1:
The patent employs dynamic positioning systems that can adjust the relative position and orientation of the susceptor assembly and injector plate in real-time during the deposition process. actuators are controlled to compensate for thermal expansion, pressure-induced deformation, and other dynamic changes that affect parallelism, thereby maintaining precise alignment throughout the processing cycle despite varying temperature and pressure conditions.
Solution Approach 2:
The system incorporates sensors and feedback control mechanisms that continuously monitor the relative position and parallelism between components. Based on feedback signals indicating deviations from the desired alignment, the control system automatically adjusts the actuators to restore and maintain the correct parallelism, compensating for changes caused by temperature and pressure variations.
3Quantity of substance
If large diameter susceptors are used to hold sufficient wafers, then the batch capacity is increased, but the components become heavy and difficult to position precisely
Solution Approach 1:
The patent replaces manual mechanical positioning of heavy large-diameter susceptor assemblies with automated positioning systems using actuators. These actuators can precisely control the position and orientation of the heavy susceptor assembly without requiring manual handling, thereby maintaining ease of operation despite the increased weight and size necessary for high wafer capacity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly reduces alignment time, ensures precise parallelism and motion control, and maintains a gas-tight vacuum environment, enhancing the efficiency and accuracy of deposition processes by allowing for automatic and precise positioning and rotation of susceptor assemblies.
Implementation Method 1
A bearing assembly includes a spherical roller bearing positioned around the shaft to form a seal between the shaft and the vacuum chamber
Data Source
AI summary
Apparatus and methods for aligning large susceptors in batch processing chambers are described. Apparatus and methods for controlling the parallelism of a susceptor relative to a gas distribution assembly are also described.