Coated Susceptor Roughness Zoning for Uniform Substrate Heating

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Solution Overview

Problem

Existing susceptors used in epitaxy processes suffer from temperature non-uniformities across the substrate surface, which affect the quality of processes such as deposition.

Innovation Solution

The susceptor features regions with varying levels of roughness on its surfaces to enhance thermal uniformity by adjusting heat transfer characteristics across the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a susceptor with uniform surface is used to heat a substrate, then the heating mechanism is simple, but temperature non-uniformities persist across the substrate surface

Engineering Contradiction:

Improvetemperature uniformityVSAvoidsusceptor surface structure

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

The susceptor surface is divided into multiple regions with different roughness characteristics. Specifically, the inner dish surface includes a first region with a first roughness and a second region with a second roughness different from the first. This local variation in surface quality enables different regions to transfer heat at different rates, compensating for temperature non-uniformities and achieving more uniform substrate heating.

Inventive Principle:

Principle #3Local quality

2Temperature

If the susceptor surface roughness is increased to improve heat transfer uniformity, then temperature uniformity improves, but manufacturing precision requirements increase

Engineering Contradiction:

Improvetemperature uniformityVSAvoidsurface roughness control

Core Design Contradiction:

TemperatureVSManufacturing precision

Solution Approach 1:

The invention controls the roughness parameter of the susceptor surface in different regions. By specifying that the first region has a first roughness and the second region has a second roughness (different from the first), the patent optimizes heat transfer characteristics. This parameter variation allows tuning of thermal properties to achieve uniform heating while maintaining manufacturability through defined roughness specifications.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The varying roughness levels on the susceptor surfaces improve temperature uniformity, leading to better process outcomes like improved thickness uniformity during deposition.

Implementation Method 1

The heated susceptor can then transfer heat to the substrate, primarily by radiation emitted by the susceptor

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

regions of one or more surfaces of the susceptor having different levels of roughness to improve thermal uniformity across a substrate during processing

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12512362B2Susceptor improvement

Publication Date: 2025.12.30 APPLIED MATERIALS INC

AI summary

A susceptor for processing a substrate is provided including a base and a coating formed over the base. The base includes an outer rim having an inner edge, an outer edge, and a top connecting the inner edge to the outer edge; and an inner dish disposed inside the outer rim and coupled to the outer rim, the inner dish recessed from the top of the outer rim, the inner dish having a front side and an opposing back side. The coating has an outer surface that includes a first portion formed over the front side of the inner dish. The first portion of the outer surface of the coating includes a first region and a second region, the first region has a first average level of roughness, the second region has a second average level of roughness.