Susceptor Segmentation for Epitaxial Growth Deposit Removal
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Solution Overview
Problem
The existing susceptor used in epitaxial growth systems for semiconductor optoelectronic devices faces issues with deposit accumulation, leading to surface damage and reduced productivity due to methods like striking or baking, which either damage the susceptor or render it unusable for extended periods.
Innovation Solution
A susceptor design featuring a detachable outer ring and inner ring, with multiple sub-elements and spacers, allowing for targeted replacement of damaged parts and reducing the need for time-consuming baking, thereby extending the susceptor's lifespan and maintaining productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the susceptor surface is struck to remove deposits, then the deposits are removed from the susceptor surface, but the susceptor surface is damaged and its thickness is reduced, making it unusable for further production
Solution Approach 1:
The susceptor is divided into a base part and a detachable cover, where the cover contains the deposits and can be separated from the base part. This segmentation allows the cover to be replaced independently when deposits accumulate, preserving the base part for continued use and eliminating the need to discard the entire susceptor after surface damage.
Solution Approach 2:
The cover is extracted as a separate removable component from the base part. When deposits accumulate on the cover, the entire cover can be taken out and discarded or cleaned, while the base part remains intact for continued production use. This extraction principle resolves the contradiction by isolating the deposit-prone component from the valuable base structure.
2Reliability
If the susceptor is baked for 8 hours to remove deposits, then the deposits are removed from the susceptor, but the productivity is significantly reduced due to extended downtime
Solution Approach 1:
By segmenting the susceptor into a reusable base part and a disposable cover, the system eliminates the need for time-consuming baking processes. The cover can be quickly replaced without extended downtime, thereby maintaining high productivity while ensuring epitaxial layer quality through proper cover design.
Solution Approach 2:
The cover is designed as a disposable or easily replaceable component with lower value than the base part. Instead of investing extensive time in cleaning and restoring the entire susceptor through baking, the system uses inexpensive, short-lived covers that can be rapidly exchanged, thus maintaining high production rates while ensuring quality.
3Reliability
If the entire susceptor is replaced when deposits accumulate, then the quality of epitaxial layers is maintained, but the susceptor expense becomes considerable
Solution Approach 1:
The susceptor is segmented into a high-value base part and a low-value cover. Only the cover needs to be replaced when deposits accumulate, while the expensive base part is preserved for repeated use. This segmentation dramatically reduces material loss and operational costs compared to replacing the entire susceptor.
Solution Approach 2:
The cover is extracted as a separate replaceable component that contains the deposits. By taking out and discarding only the contaminated cover while retaining the valuable base part, the system minimizes material waste and reduces operational expenses while maintaining epitaxial layer quality standards.
Data Source
AI summary
A susceptor, comprising: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring; wherein the inner ring and the outer ring separate the holders from one another. A susceptor, comprising: a base part; multiple holders distributed on the base part for accommodating wafers; a cover comprising a first surface facing the base part, and a second surface opposite to the first surface; a first positioning structure; a second positioning structure formed in the first surface; and a third positioning structure formed in the base part, wherein the cover connects to the base part by associating the first positioning structure with the second positioning structure and the third positioning structure.