Susceptor Segmentation for Epitaxial Deposit Removal
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Solution Overview
Problem
Existing susceptors in epitaxial growth systems face significant challenges due to deposit accumulation, which requires either damaging the surface for removal or time-consuming baking, leading to reduced productivity and increased costs, as they cannot be reused effectively without compromising the quality of epitaxial layers.
Innovation Solution
A susceptor design featuring a detachable outer ring and inner ring, with multiple sub-elements made of materials like sapphire, boron nitride, or graphite, allowing for the replacement of damaged components and eliminating the need for extensive baking, thereby reducing maintenance costs and increasing productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the susceptor surface is struck to remove deposits, then the deposits are removed, but the surface is damaged and the susceptor cannot be reused
Solution Approach 1:
The susceptor is divided into a base part and multiple detachable ring parts (inner ring and outer ring). The outer ring can be removed and replaced independently when deposits accumulate, while the base part and inner ring remain intact for continued use. This segmentation allows the removable outer ring to bear the damage from deposit removal processes, protecting the critical base part and enabling susceptor reuse.
2Ease of manufacture
If the susceptor is baked for 8 hours to remove deposits, then the deposits are removed, but the productivity is significantly reduced
Solution Approach 1:
The susceptor is segmented into replaceable ring parts that can be quickly swapped out when deposits accumulate. This eliminates the need for time-consuming 8-hour baking processes, as the outer ring can be removed and replaced in minutes, thereby maintaining high productivity while still achieving deposit removal.
Solution Approach 2:
The susceptor design anticipates deposit accumulation by providing a replaceable outer ring that can be pre-prepared offline. While one susceptor is in use, another can be prepared with a fresh outer ring, allowing for quick replacement without interrupting the production schedule significantly.
3Duration of action of stationary object
If the outer ring is detachably connected to the base part, then the lifespan of the susceptor is extended, but the device complexity increases
Solution Approach 1:
The susceptor is divided into a base part and detachable ring parts connected through simple positioning structures. The outer ring and inner ring can be independently attached and removed using straightforward mechanical interfaces, extending the susceptor lifespan by enabling component replacement without requiring complex assembly mechanisms.
Solution Approach 2:
Only the outer ring, which is most susceptible to deposit accumulation and damage, is made detachable. The base part and inner ring maintain fixed connections to ensure structural stability. This localized detachability extends lifespan where needed while minimizing the increase in overall device complexity.
Data Source
AI summary
A susceptor, comprises: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring; wherein the inner ring and the outer ring separate the holders from one another.