Susceptor Surface Feature for Reduced Thermal Reflection
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Solution Overview
Problem
In process chambers, such as epitaxial deposition chambers, the radiant energy from heat sources interferes with accurate temperature measurement of the susceptor due to reflection, leading to noise in the temperature signal detected by remote sensors like pyrometers.
Innovation Solution
A susceptor with a feature on its surface, designed to absorb incident radiant energy at specific wavelengths, reduces thermal reflection and enhances energy absorption, thereby improving the accuracy of temperature measurements by minimizing noise received by temperature sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If radiant energy sources are used to heat the susceptor, then heating efficiency is improved, but reflected radiant energy creates noise that interferes with temperature measurement accuracy
Solution Approach 1:
The patent applies this principle by converting the harmful reflected radiant energy into a beneficial effect. A selective absorber coating is applied to the susceptor surface that specifically absorbs the wavelength of radiant energy from the heat source while remaining transparent at the pyrometer measurement wavelength. This transforms the previously harmful reflection into useful absorption of heating energy, thereby improving both heating efficiency and temperature measurement accuracy simultaneously
2Loss of energy
If a selective absorber coating is applied to the susceptor, then absorption of incident radiant energy is improved, but manufacturing complexity increases
Solution Approach 1:
The patent applies this principle by changing the optical parameters of the susceptor surface through a selective absorber coating. The coating is designed with specific optical properties that enable it to absorb radiant energy at the heat source wavelength while remaining transparent at the pyrometer wavelength. This parameter change allows the susceptor to achieve superior energy absorption without fundamentally altering its manufacturing process, as the coating can be applied as a thin layer on the existing susceptor structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The feature on the susceptor surface enhances energy absorption, reducing reflected radiation and improving the signal-to-noise ratio of temperature readings, leading to more accurate and reliable temperature data for the susceptor.
Implementation Method 1
a feature on the second surface, configured to absorb more incident energy than a surface of the susceptor without the feature
Implementation Method 2
The temperature can be sensed using remote temperature sensors capable of detecting thermal radiation, for example, pyrometers, to detect a signal emitted by the susceptor that is proportional to the temperature of the susceptor
Data Source
AI summary
Methods and apparatus are provided for reducing the thermal signal noise in process chambers using a non-contact temperature sensing device to measure the temperature of a component in the process chamber. In some embodiments, a susceptor for supporting a substrate in a process chamber includes a first surface comprising a substrate support surface; and a second surface opposite the first surface, wherein a portion of the second surface comprises a feature to absorb incident radiant energy.