Susceptor Temperature Control Using Preheated Circulation Fluid

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Solution Overview

Problem

Existing flowrate control units for temperature adjustment in semiconductor manufacturing devices require significant time to adjust the temperature of a susceptor, leading to inefficiencies and potential losses in processing time as multiple process gases and conditions are switched.

Innovation Solution

A flowrate control unit that includes an output pipe, temperature measuring parts, a control device, and a fluid control part to adjust the temperature of a susceptor by circulating a temperature control fluid. This unit performs first and second adjusting operations to rapidly change the susceptor temperature by using prescribed temperature control values and gradually changing the temperature control fluid's temperature.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the temperature control fluid temperature is set equal to the target susceptor temperature, then the susceptor temperature can be accurately controlled, but the temperature adjustment time becomes excessively long

Engineering Contradiction:

Improvesusceptor temperature control accuracyVSAvoidtemperature adjustment time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The system performs preliminary heating by setting the temperature control fluid temperature higher than the target susceptor temperature before the susceptor reaches the target temperature. This preliminary action reduces the time required for temperature adjustment while still achieving accurate target temperature control through subsequent feedback regulation.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The temperature control fluid temperature is dynamically adjusted based on the current susceptor temperature. The control temperature is set higher than the target temperature when the susceptor temperature is below the target, and then gradually reduced as the susceptor approaches the target temperature, creating a dynamic control strategy that optimizes both speed and accuracy.

Inventive Principle:

Principle #15Dynamics

2Loss of time

If the temperature control fluid temperature is set higher than the target susceptor temperature to speed up heating, then the temperature adjustment time is reduced, but the temperature control accuracy deteriorates

Engineering Contradiction:

Improvetemperature adjustment timeVSAvoidsusceptor temperature control accuracy

Core Design Contradiction:

Loss of timeVSManufacturing precision

Solution Approach 1:

The system continuously monitors the susceptor temperature and uses this feedback to dynamically adjust the temperature control fluid temperature. When the susceptor temperature approaches the target, the control fluid temperature is reduced to prevent overshooting, thereby maintaining both fast response and high precision through closed-loop feedback control.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The control strategy dynamically changes the temperature control fluid temperature based on the real-time temperature difference between the susceptor and target temperature. This dynamic adjustment allows aggressive heating when the gap is large while ensuring precise control when the gap is small, resolving the contradiction between speed and accuracy.

Inventive Principle:

Principle #15Dynamics

3Productivity

If frequent temperature adjustments are made for switching process gases, then the manufacturing efficiency is improved, but the cumulative time loss increases

Engineering Contradiction:

Improvemanufacturing efficiencyVSAvoidcumulative temperature adjustment time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The system prepares for temperature adjustments by pre-heating the temperature control fluid to a temperature higher than the target susceptor temperature before the actual temperature adjustment is needed. This preliminary action significantly reduces the time required for each temperature adjustment during process gas switching, thereby reducing cumulative time loss while maintaining high manufacturing efficiency.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution enables high-speed adjustment of the susceptor temperature, reducing the time required to reach the target temperature by approximately 60-75% compared to conventional methods, thereby enhancing the efficiency of semiconductor manufacturing processes.

Implementation Method 1

adjust a temperature of a susceptor from a prescribed first temperature to a prescribed second temperature by circulating a temperature control fluid to the susceptor

Methodology Applied

Scientific EffectHeat conduction: Conduction (thermal)

Data Source

PatentUS20250191895A1Flowrate control unit for temperature adjustment and semiconductor manufacturing device

Publication Date: 2025.06.12 CKD CORP

AI summary

According to the present invention, when the current temperature of a fluid for post-circulation temperature control is lower than a second temperature, the temperature of the fluid for temperature control is adjusted on the basis of a first temperature control value indicating a temperature (fourth temperature) higher than the second temperature until the current temperature rises to a prescribed threshold value (third temperature) lower than the second temperature. When the current temperature has risen to the threshold value (third temperature), the temperature of the fluid for temperature control is adjusted on the basis of a second temperature control value indicating a temperature equal to the second temperature.