Susceptor Thermal Break Cooling for Motor Overheat Protection
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Solution Overview
Problem
Susceptor assemblies in chemical vapor deposition and atomic layer deposition processes experience overheating due to high temperatures and hot processing gas, leading to potential damage and increased maintenance costs.
Innovation Solution
A susceptor assembly thermal break with a heat exchange passage and a cooling jacket is introduced, which includes a body with channels and passages for heat transfer, allowing for efficient cooling of the susceptor assembly and its components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the susceptor assembly is heated to elevated temperatures for deposition processing, then the deposition process can be performed, but the motor and susceptor assembly components are subject to overheating and potential damage
Solution Approach 1:
The susceptor assembly is divided into thermally isolated segments: a susceptor portion for heating and a motor portion for rotation control. The thermal break physically separates these segments to prevent heat transfer from the susceptor to the motor, allowing the susceptor to operate at elevated temperatures while the motor remains cool and reliable
Solution Approach 2:
A thermal break component acts as an intermediary element between the hot susceptor and the motor. This thermal break includes a heat exchange passage with coolant flow that actively removes heat from the motor area, serving as a thermal barrier that protects the motor from overheating while allowing the susceptor to maintain deposition processing temperatures
2Loss of energy
If conventional water cooling blocks with vacuum seals are used, then some cooling is provided, but the heat transfer rate is insufficient due to complicated heat transfer paths
Solution Approach 1:
The cooling system transitions from a complex multi-path heat transfer approach to a simplified single-dimension solution: a through-channel extending axially through the thermal break from the motor side to the exterior. This linear, one-dimensional cooling path dramatically simplifies the cooling system design while improving heat removal efficiency from the motor area
3Reliability
If motors with increased maximum operating temperatures are used, then motor overheating issues are alleviated, but the components are expensive and have long lead times for development and qualification
Solution Approach 1:
Instead of allowing the harmful effect of heat to accumulate in the motor, the invention actively converts this thermal energy into a manageable form by introducing coolant flow through the thermal break. The heat generated by the motor is captured and removed through the heat exchange passage, transforming the overheating problem into a controlled thermal management solution that allows使用 of standard, cost-effective motors
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The thermal break effectively reduces the temperature across the susceptor assembly, preventing overheating and associated damage, thereby reducing maintenance time and costs while maintaining production throughput.
Implementation Method 1
A thermal break effectively reduces the temperature across the susceptor assembly
Implementation Method 2
heat exchange passage within the body
Implementation Method 3
heat exchange flow path within the heat exchange passage
Data Source
AI summary
Apparatus and methods for cooling down a susceptor assembly are described. A heat exchange passage in a susceptor assembly thermal break transfers heat from processing gases that flow through the susceptor assembly to a cooling jacket and cools down the susceptor assembly and associated hardware.