Susceptor Alignment Through a Transparent Chamber Window
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Solution Overview
Problem
The traditional method for aligning a susceptor in a semiconductor processing chamber is cumbersome and time-consuming, often involving repeated opening and closing of a transparent dome, which can cause additional issues.
Innovation Solution
An alignment apparatus and method that includes a rotational module and a fitting module, allowing for precise alignment of the susceptor without removing the transparent window, using a sensor to measure positional information and adjust the susceptor's position through slots in a fitting plate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the traditional method of repeated opening and closing of the transparent dome is used for alignment, then the susceptor can be aligned, but the process becomes time-consuming and cumbersome
Solution Approach 1:
The patent applies preliminary action by pre-installing reference marks on the susceptor and corresponding detection marks on the chamber wall before the alignment process begins. This allows the alignment system to immediately detect and measure positional deviations without requiring repeated opening and closing of the transparent dome, thereby reducing alignment time while maintaining precision
Solution Approach 2:
The patent replaces the mechanical manual alignment method (repeated opening/closing of dome for visual inspection and manual adjustment) with an optical detection system using lasers and sensors. The laser beam passes through the transparent dome to detect positional relationships between reference marks and detection marks, substituting mechanical operations with optical measurement to achieve faster alignment
2Ease of operation
If the transparent dome is repeatedly opened and closed for alignment, then the susceptor position can be adjusted, but additional issues and potential damage may occur
Solution Approach 1:
The patent applies preliminary action by pre-installing reference marks on the susceptor and corresponding detection marks on the chamber wall before the alignment process begins. This allows the alignment system to immediately detect and measure positional deviations without requiring repeated opening and closing of the transparent dome, thereby reducing alignment time while maintaining precision
Solution Approach 2:
The patent replaces the mechanical manual alignment method (repeated opening/closing of dome for visual inspection and manual adjustment) with an optical detection system using lasers and sensors. The laser beam passes through the transparent dome to detect positional relationships between reference marks and detection marks, substituting mechanical operations with optical measurement to achieve faster alignment
3Productivity
If a complex alignment system is introduced to reduce alignment time, then productivity improves, but device complexity increases
Solution Approach 1:
The patent applies universality by designing the alignment apparatus with multi-functional components. The transparent dome serves dual purposes: as a protective cover during normal operation and as a transmission medium for laser beams during alignment. The reference marks and detection marks provide universal reference points for both susceptor positioning and alignment measurement, reducing the need for separate dedicated alignment components
Solution Approach 2:
The patent applies self-service by enabling the alignment system to automatically detect and calculate positional deviations using the laser detection apparatus and pre-installed reference marks. The system self-calibrates by comparing the positions of reference marks on the susceptor with detection marks on the chamber wall, eliminating the need for complex manual measurement tools and procedures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates faster and more precise alignment of the susceptor, reducing the time and effort required during installation or maintenance, while maintaining the integrity of the transparent window.
Implementation Method 1
The measuring module includes a laser module attached to a transparent plate
Data Source
AI summary
Disclosed herewith are an alignment apparatus and an alignment method for a susceptor of a processing chamber. The alignment apparatus includes a rotational module and a fitting module. The rotational module includes a bearing unit, a tubular member, and an attachment bracket. The attachment bracket is coupled to an end of the tubular member that is coupled to the bearing unit. The fitting module is coupled to the rotational module and includes a transparent plate configured to be disposed at a location above a susceptor of the processing chamber. The transparent plate includes plurality of first openings disposed along a first circular path and couples to a sensor that is configured to be positioned at a plurality of predetermined positions arranged along a second circular path that is concentric with the first circular path.