Susceptorless Substrate Support with Light-Blocking Rings
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Substrate processing systems face challenges in achieving precise thermal control and preventing thermal averaging effects without a susceptor plate, while also dealing with interference from light energy used for heating that affects temperature measurement accuracy.
Innovation Solution
The implementation of a substrate support system comprising a first ring to support the substrate near its peripheral edge, a second ring disposed about the first ring, and a path between them that allows rotation and minimizes light transmission between volumes, along with a temperature sensor to accurately measure substrate temperature by limiting light from the lamphead.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a susceptor plate is used to support the substrate, then thermal control is simplified, but thermal averaging effects occur that reduce heating precision
Solution Approach 1:
The patent removes the susceptor plate from the system entirely, extracting the source of thermal averaging effects. The substrate is supported directly by pins or points without a large conductive plate, allowing multi-zonal lamps to heat different regions independently without thermal redistribution through the susceptor.
Solution Approach 2:
The heating system is segmented into multiple independent zones with separate lamps positioned to heat specific regions of the substrate. This segmentation allows precise control of temperature distribution without the thermal averaging that would occur with a uniform susceptor plate.
2Manufacturing precision
If multi-zonal lamps are used without a susceptor plate, then heating precision is improved, but temperature measurement accuracy is reduced due to light interference
Solution Approach 1:
A light-blocking structure is introduced as an intermediary element between the multi-zonal lamps and the temperature sensor. This mediator prevents direct light paths from the lamps to the sensor, eliminating the interference that would otherwise corrupt temperature measurements while allowing the precise heating configuration to be maintained.
Solution Approach 2:
The patent extracts or removes the harmful light interference from the measurement path by positioning light-blocking structures that prevent lamp light from reaching the temperature sensor, thereby isolating the measurement system from the heating system's optical interference.
3Measurement precision
If light blocking structures are added to prevent interference, then temperature measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The light-blocking structures are designed to serve multiple functions: they block light from reaching the temperature sensor while also providing structural support for the lamp assembly or substrate support system. This multi-functionality reduces the need for separate dedicated light-blocking components, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances thermal control and prevents thermal averaging, ensuring accurate temperature measurement by restricting light interference, thereby improving the precision of substrate processing without a susceptor plate.
Implementation Method 1
a lamphead to provide energy to a substrate when disposed on the substrate support
Implementation Method 2
a temperature sensor opposing the lamphead to measure energy radiated from the substrate
Data Source
AI summary
Methods and apparatus for processing substrates are provided herein. In some embodiments, an apparatus includes a process kit, the process kit comprising a first ring to support a substrate proximate a peripheral edge of the substrate; a second ring disposed about the first ring; and a path formed between the first and second rings that allows the first ring to rotate with respect to the second ring, wherein the path substantially prevents light from travelling between a first volume disposed below the first and second rings and a second volume disposed above the first and second rings.