Suspended Channel Field-Effect Transistor for Mobility

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Solution Overview

Problem

Conventional field-effect transistors face challenges in charge carrier mobility due to substrate interactions and limited control over channel conductance, especially with the gate electrode positioned on top, which affects the on/off ratio and capacitance.

Innovation Solution

The apparatus suspends a portion of the channel member to expose opposing surfaces, allowing for different functional coatings and positioning of electrodes to enhance charge carrier mobility and control channel conductance using ion gel dielectrics and reversible deformation materials, facilitating greater on/off ratios and simplified fabrication.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the gate electrode is positioned on top of the channel member, then the device structure is simplified, but the charge carrier mobility and on/off ratio are limited due to substrate interactions

Engineering Contradiction:
Improvedevice structureVSAvoidcharge carrier mobility
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent transitions from a conventional planar top-gate configuration to a three-dimensional suspended channel structure. The channel member is suspended above the substrate, exposing both top and bottom surfaces to gate control. This dimensional change allows the gate electrode to control charge carriers throughout the entire channel volume, significantly improving mobility and on/off ratio while eliminating substrate interactions that limit performance in conventional devices.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The channel member is divided into suspended and supported portions, with only the suspended portion exposed to gate control. This segmentation allows selective control of charge carriers in the suspended region while isolating it from substrate effects. The channel is effectively segmented into regions with different electrical characteristics, enabling improved device performance.

Inventive Principle:
Principle #1Segmentation

2Reliability

If the channel member is fully suspended to expose opposing surfaces, then charge carrier mobility and on/off ratio are improved, but the fabrication process becomes more complex

Engineering Contradiction:
Improveon/off ratioVSAvoidfabrication process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The fabrication process employs preliminary patterning and release hole formation before final channel release. sacrificial layers are deposited and patterned in advance, creating predefined release pathways. This preliminary action simplifies the subsequent channel release process by providing pre-established access points, reducing the complexity of creating fully suspended structures compared to conventional sequential fabrication approaches.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

Sacrificial layers serve as intermediary materials during fabrication. These temporary structures facilitate channel release and suspension by providing a controlled mechanism to remove substrate material. The sacrificial layers are deposited, patterned, and then removed through the pre-formed release holes, enabling channel suspension without requiring complex direct etching or release processes.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If functional coatings are applied to both top and bottom surfaces of the suspended channel, then device functionality is enhanced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvedevice functionalityVSAvoidcoating uniformity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The suspended channel structure enables self-service coating application through capillary action and surface tension effects. When the channel is suspended, functional coatings can be applied to both surfaces simultaneously through dip-coating or spray methods, with the coating material naturally distributing itself across the exposed surfaces. The geometry of the suspended structure facilitates uniform coating without requiring complex precision alignment or sequential coating processes.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The suspended channel configuration provides universal access to both top and bottom surfaces, enabling a single coating process to functionalize both surfaces. This multi-functional approach allows simultaneous application of gate dielectric, functional, or sensing coatings to both surfaces, reducing the need for separate precision coating operations and lowering manufacturing precision requirements compared to conventional planar structures.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Reliability

If ion gel dielectrics are used for gate control, then capacitance and control efficiency are improved, but the device becomes sensitive to reversible deformation

Engineering Contradiction:
ImprovecapacitanceVSAvoiddevice stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent embraces the dynamic nature of ion gel dielectrics by designing the suspended channel structure to accommodate reversible deformation. The suspended configuration allows the channel to flex and deform in response to ion gel volume changes without compromising structural integrity. This dynamic design converts the potential stability issue into a functional feature, enabling devices that can respond to mechanical stimuli while maintaining electrical performance.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The suspended channel member acts as a flexible element that can accommodate the mechanical properties of ion gel dielectrics. The thin, suspended structure allows for reversible deformation when ion gel expands or contracts, maintaining electrical connectivity and gate control functionality. This flexible design approach integrates the mechanical compliance of ion gel with the electrical performance requirements of the field-effect device.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration increases charge carrier mobility, improves the on/off ratio, and simplifies the fabrication process by reducing substrate effects and enabling efficient control of channel conductance with ion gel dielectrics, while allowing for reversible deformation in electronic devices.

Implementation Method 1

positioning of electrodes to enhance charge carrier mobility and control channel conductance using ion gel dielectrics

Methodology Applied
Scientific EffectIon gel dielectric: Dielectric

Implementation Method 2

enhance charge carrier mobility and control channel conductance

Methodology Applied
Scientific EffectCharge carrier mobility: Conduction (electrical)

Implementation Method 3

field-effect devices, associated methods and apparatus, and specifically concerns an apparatus comprising a channel member having a portion which is suspended to expose opposing surfaces

Methodology Applied
Scientific EffectField-effect: Electric Field

Implementation Method 4

positioning of electrodes to enhance charge carrier mobility and control channel conductance using ion gel dielectrics and reversible deformation materials

Methodology Applied
Scientific EffectReversible deformation: Elasticity

Data Source

PatentEP3054486B1A field-effect apparatus, associated apparatus and methods
Publication Date: 2021.07.07 NOKIA TECHNOLOGIES OY
  • EP3054486B1 patent drawingFigure 1~2b
  • EP3054486B1 patent drawingFigure 2c~3
  • EP3054486B1 patent drawingFigure 4a~4d

AI summary

An apparatus comprising a channel member, first and second electrodes configured to enable a flow of electrical current from the first electrode through the channel member to the second electrode, and a supporting substrate configured to support the channel member and the first and second electrodes, wherein one or more of the supporting substrate and electrodes are configured such that a portion of the channel member is suspended to expose opposing surfaces of the portion, the exposed opposing surfaces comprising respective functional coatings thereon configured to facilitate variation of the flow of electrical current through the channel member.