Suspended Getter Material Structure for Low Thermal Inertia
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Solution Overview
Problem
Existing getter material structures in microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) require high thermal activation power and have high thermal inertia, limiting their efficiency in creating high vacuum environments.
Innovation Solution
A getter material structure with a substrate and at least one getter material layer mechanically connected by a support, where the support's surface in contact with the substrate is smaller than the getter material layer's surface, allowing for partial exposure of the getter material's second face for gas absorption and reducing direct thermal contact, thereby lowering thermal activation power and inertia.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a thin getter material layer is deposited directly on a substrate to increase gas absorption surface area, then the gas absorption capacity is improved, but the thermal activation power and thermal inertia increase
Solution Approach 1:
The patent divides the getter material structure into multiple discrete projections or pillars rather than a continuous layer. Each projection is independently supported on the substrate, creating segmented thermal pathways. This segmentation reduces the total thermal contact area between the getter material and substrate, thereby reducing thermal inertia and activation power requirements while maintaining sufficient gas absorption surface area through the projected surfaces of the projections.
Solution Approach 2:
The patent applies different thermal characteristics to different parts of the structure. The substrate-projection interface has minimal thermal contact (low thermal conductivity path), while the projection surfaces exposed to the vacuum environment have high gas absorption capability. This local differentiation allows the getter material to be thermally isolated from the substrate where needed, reducing thermal activation requirements, while maintaining gas absorption functionality at the exposed surfaces.
2Area of stationary object
If a getter material layer is deposited on projections to increase surface area, then the total absorbent surface is improved, but the heating time and energy required for thermal activation increase
Solution Approach 1:
By segmenting the getter material into discrete projections with minimal substrate contact, the patent creates independent thermal zones. Each projection can be heated more quickly and independently, reducing the overall heating time compared to a continuous layer that requires uniform heating across the entire substrate interface. The segmented structure allows thermal energy to be concentrated on smaller, isolated surfaces rather than distributed across a large continuous contact area.
3Quantity of substance
If a stack of getter material layers is used to improve gas absorption capacity, then the pumping capacity is improved, but the thermal activation temperature and power requirements increase
Solution Approach 1:
The patent uses vertically stacked projections or multi-layer structures where each layer is segmented and supported on the substrate through minimal contact points. This vertical segmentation with thermal isolation at each interface allows heat to be efficiently distributed through the stack without excessive thermal loss to the substrate. The segmented support structure reduces thermal short-circuiting, enabling lower activation temperatures compared to continuous multi-layer deposits while maintaining the enhanced pumping capacity of multiple layers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the energy and time required for thermal activation while increasing gas absorption capacity and reducing thermal inertia, enabling more efficient gas absorption and vacuum creation in MEMS and NEMS devices.
Implementation Method 1
A getter material is a material comprising, intrinsically and/or by its microscopic morphology, absorbent and/or adsorbent properties with respect to gaseous molecules
Implementation Method 2
absorbent and/or adsorbent properties with respect to gaseous molecules, thus capable of forming a chemical pump
Implementation Method 3
This material is then thermally activated by heating it through the wall of the chamber on which it has been deposited
Data Source
AI summary
Getter structure comprising a substrate and at least one getter material-based layer mechanically connected to the substrate by means of at least one support, in which the surface of the support in contact with the substrate is smaller than the surface of a first face of the getter material layer, in which said first face is in contact with the support, and a second face of the getter material layer, opposite said first face is at least partially exposed.