Ceiling-Suspended Wafer Storage System for Fab Space Optimization
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Solution Overview
Problem
Semiconductor fabrication facilities face challenges in efficiently storing semiconductor wafers due to the high cost and space requirements of traditional centralized stockers, which lead to traffic congestion and throughput limitations, necessitating a more efficient and space-minimal container storage system.
Innovation Solution
A storage system utilizing movable storage shelves connected by a drive chain and guided by a rail system, with active ports for loading and unloading, allowing for high-density storage close to processing tools, reducing the need for extensive floor space and minimizing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If traditional centralized stockers are used, then storage capacity is provided, but floor space consumption increases and traffic congestion occurs
Solution Approach 1:
The patent transitions from floor-based storage to ceiling-suspended storage, utilizing the vertical dimension and overhead space. The storage system hangs from the ceiling structure, converting unused vertical space into functional storage capacity, thereby eliminating the need for additional floor space while maintaining storage capability.
Solution Approach 2:
The storage system is integrated with the existing ceiling infrastructure of the fabrication facility. By merging the storage function with the structural ceiling elements, the system avoids occupying separate floor space and leverages existing structural support, thereby providing storage capacity without increasing floor space consumption.
2Loss of time
If smaller distributed stockers are used, then delivery time is reduced, but device complexity and cost increase
Solution Approach 1:
The system employs a robotic retrieval mechanism that can dynamically and quickly access any storage location within the suspended array. This dynamic retrieval capability enables fast delivery of containers to processing tools without requiring multiple distributed stockers, thereby reducing delivery time while maintaining system simplicity.
Solution Approach 2:
A robotic intermediary system serves as the mediator between the centralized suspended storage and the processing tools. This single robotic system can service multiple tools, providing fast container delivery without duplicating storage infrastructure, thus reducing both delivery time and system complexity compared to multiple distributed stockers.
3Ease of operation
If smaller distributed stockers are used, then local storage is provided, but floor space usage increases
Solution Approach 1:
The storage system suspends containers from the ceiling in vertical arrays, utilizing the overhead vertical dimension rather than horizontal floor space. This dimensional transition allows local storage capacity to be provided near processing tools without consuming valuable floor area, as the storage occupies otherwise unused ceiling space.
4Ease of operation
If stacker robot operating clearance space is provided, then robot operation is enabled, but storage density decreases
Solution Approach 1:
A robotic intermediary system serves as the mediator between the centralized suspended storage and the processing tools. This single robotic system can service multiple tools, providing fast container delivery without duplicating storage infrastructure, thus reducing both delivery time and system complexity compared to multiple distributed stockers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables efficient, high-density storage of semiconductor wafers near processing tools, reducing floor space usage and congestion, while maintaining high storage capacity and accessibility, thus optimizing the use of valuable fab space.
Implementation Method 1
movable storage shelves connected by a drive chain and guided by a rail system
Data Source
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AI summary
A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.