Suspension Beam Structure for Probe Verticality in 3D Metrology

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Solution Overview

Problem

Maintaining vertical alignment of a probe in micro-nano coordinate metrology while allowing unrestricted movement to track surface variations without interference is a key challenge.

Innovation Solution

A suspension structure with uniformly distributed suspension beams in a circumferential direction, configured to suspend a probe, ensuring uniform force application and vertical stability, combined with a detection module and micro-displacement detection device for accurate 3D measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If the probe is rigidly fixed to maintain vertical alignment, then vertical stability is improved, but the probe cannot move freely to track surface variations

Engineering Contradiction:

Improvevertical alignment stabilityVSAvoidprobe movement freedom

Core Design Contradiction:

Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The support structure is segmented into multiple suspension beams uniformly distributed around the probe. Each beam independently supports the probe while collectively providing stable suspension, allowing the probe to maintain vertical alignment through the combined effect of multiple segments rather than rigid fixation

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The suspension beams are positioned at specific locations around the probe with uniform distribution. This local arrangement creates zones of support that collectively provide vertical stability while leaving other areas free for movement, achieving both stability and adaptability through spatial differentiation

Inventive Principle:

Principle #3Local quality

2Adaptability or versatility

If the probe is freely suspended to allow unrestricted movement, then adaptability is improved, but vertical alignment cannot be maintained

Engineering Contradiction:

Improveprobe movement freedomVSAvoidvertical alignment stability

Core Design Contradiction:

Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The uniform distribution of suspension beams creates an equipotential support condition around the probe, where the probe experiences equal support forces from all directions. This equipotential arrangement allows the probe to move freely in response to surface variations while maintaining vertical alignment through balanced forces

Inventive Principle:

Principle #12Equipotentiality

3Stability of the object's composition

If multiple suspension beams are uniformly distributed, then vertical alignment is maintained through uniform force, but structural complexity increases

Engineering Contradiction:

Improvevertical alignment stabilityVSAvoidsuspension structure complexity

Core Design Contradiction:

Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The suspension beams serve multiple functions simultaneously: they support the probe vertically, distribute forces uniformly around the probe, and allow free movement in the measurement direction. This multi-functionality reduces the need for additional separate components, offsetting the apparent complexity with functional integration

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The uniform distribution of suspension beams around the probe creates a radially symmetric, sphere-like support configuration. This curved, radial arrangement naturally provides uniform force distribution and vertical alignment while being structurally efficient, reducing complexity compared to asymmetric or non-uniform support arrangements

Inventive Principle:

Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The suspension structure maintains probe verticality and rigidity, enabling accurate tracking of surface variations without interference, ensuring precise 3D measurement data acquisition.

Implementation Method 1

The plurality of suspension beams may be provided between the central region and the fixing frame. Two ends of each of the plurality of suspension beams may be connected with an outer edge of the central region and the inner edge of the fixing frame, respectively.

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS20260063450A1Suspension structure, and detection module and micro-displacement detection device comprising the same

Publication Date: 2026.03.05 SHANGHAI JICE INFORMATION TECHNOLOGY CO LTD

AI summary

The present disclosure provides a suspension structure, and a detection module and a micro-displacement detection device comprising the same. The suspension structure comprises a central region, a fixing frame, and a plurality of suspension beams. The central region is circular and configured to fix an upper end of a probe. The fixing frame is provided around the central region. An inner edge of the fixing frame is circular and coaxial with the central region. The fixing frame is configured to fix to a clamping assembly. The plurality of suspension beams are provided between the central region and the fixing frame. Two ends of each of the plurality of suspension beams are connected with an outer edge of the central region and the inner edge of the fixing frame, respectively. The plurality of suspension beams are uniformly distributed in a circumferential direction of the central region.