Switchable Load Ports for Flexible Wafer Pod Storage
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in flexibly adapting to changes in the storage number of substrate storage containers, leading to inefficiencies and potential shortages in storage capacity.
Innovation Solution
The apparatus is equipped with load ports that can switch between loading/unloading functions and storage functions, utilizing a controller for error prevention and mode switching, allowing flexible use of load ports as both load ports and additional storage shelves to accommodate varying numbers of substrate storage containers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If load ports are dedicated solely to loading/unloading substrate storage containers, then the reliability of the loading/unloading function is improved, but the adaptability to storage capacity changes deteriorates
Solution Approach 1:
The load port is designed to perform multiple functions: it can serve as a loading/unloading port when needed, or be converted into an additional storage shelf to expand storage capacity. The controller manages the switching between these functions by controlling the pod clamp mechanism to either clamp/release pods at the load port or hold pods on the converted storage shelf, allowing the system to adapt flexibly to different storage requirements while maintaining reliable pod handling operations
2Device complexity
If the number of storage shelves is fixed, then the device complexity is reduced, but the adaptability to storage number changes deteriorates
Solution Approach 1:
The storage capacity of the apparatus is made dynamic rather than fixed. The load port can be dynamically converted into an additional storage shelf based on storage requirements. The controller dynamically adjusts the function of the load port by controlling the pod clamp mechanism to operate in different modes: clamping/releasing pods during loading/unloading operations, or holding pods stationary when the load port functions as a storage shelf, enabling flexible adaptation to varying storage needs without adding complex hardware structures
3Quantity of substance
If load ports are converted to storage shelves, then the storage capacity is improved, but the risk of erroneous operations increases
Solution Approach 1:
The controller implements feedback control to manage the pod clamp mechanism based on the operational mode. When the load port is functioning as a storage shelf, the controller receives feedback about the pod positions and maintains the clamp mechanism in a holding state to prevent accidental pod removal. The controller monitors the system state and adjusts the clamp mechanism accordingly, ensuring that pods on converted storage shelves remain securely held while preventing erroneous operations that could compromise safety
Data Source
AI summary
There is provided a technique that includes at least one load port capable of mounting a substrate storage container that stores a substrate, a controller configured to be capable of performing: a switching control to switch a first function of using the at least one load port to load or unload the substrate storage container and a second function of mounting the substrate storage container on the at least one load port; and an erroneous operation prevention control to execute an erroneous operation prevention operation to the substrate storage container arranged on the at least one load port according to use modes associated with the first function and the second function; and a process chamber configured to process the substrate.