Switchable Magnet Assembly for Precise Deposition Control

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Solution Overview

Problem

Existing deposition processes for display devices face challenges in achieving high-resolution structures due to the need for finer control over the deposition process, and there is a risk of mechanical deformation of substrates during deposition.

Innovation Solution

A magnet assembly is introduced, comprising a yoke plate and a magnetic field generator with magnet units, magnetic bodies, and non-magnetic bodies, which can operate in two modes to control the magnetic field and reduce mechanical deformation risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional deposition process is used, then the deposition can be completed, but the control precision over the deposition process is insufficient for high-resolution structures

Engineering Contradiction:
Improvedeposition control precisionVSAvoiddeposition device structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The magnetic field generator is divided into multiple magnet units arranged in a matrix structure, where each magnet unit can be independently controlled. This segmentation allows precise local control of the magnetic field during deposition, enabling high-resolution patterning while maintaining a manageable device structure through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The magnet assembly can switch between two operational modes: in the first mode, the magnet units generate a magnetic field to control deposition; in the second mode, the magnetic field is not substantially generated. This dynamic switching capability provides fine control over the deposition process, allowing precise manipulation of material deposition while reducing unnecessary magnetic field effects

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If a magnetic field is continuously generated during deposition, then deposition control is improved, but mechanical deformation of the substrate may occur

Engineering Contradiction:
Improvedeposition control precisionVSAvoidsubstrate mechanical deformation
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The magnetic field generation is performed periodically rather than continuously. The system switches between the first mode (magnetic field generated) and the second mode (magnetic field not substantially generated), applying magnetic field control only when needed for deposition precision while avoiding continuous exposure that could cause substrate deformation

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The magnet assembly dynamically adjusts its operational state between generating and not generating magnetic fields. This dynamic control allows the system to apply magnetic field effects only during critical deposition phases, minimizing the risk of mechanical deformation while maintaining deposition precision when required

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The magnet assembly enables more precise control over the deposition process, allowing for the manufacture of high-resolution display devices while minimizing the risk of substrate mechanical deformation.

Implementation Method 1

the magnetic field generator may generate a magnetic field below the magnetic bodies and the non-magnetic bodies in the first mode

Methodology Applied
Scientific EffectMagnetic field generation: Electromagnet

Implementation Method 2

the magnet units adjacent to each other in the first direction may have different polarities

Methodology Applied
Scientific EffectMagnetism: Magnetism

Data Source

PatentUS20250054668A1Magnet assembly, deposition device including magnet assembly, and deposition method using deposition device
Publication Date: 2025.02.13 SAMSUNG DISPLAY CO LTD
  • US20250054668A1 patent drawing
  • US20250054668A1 patent drawing
  • US20250054668A1 patent drawing

AI summary

A magnet assembly includes a yoke plate disposed on a plane, and a magnetic field generator which is disposed on the yoke plate and includes magnet parts including magnet units, magnetic bodies, and non-magnetic bodies. The magnetic bodies overlap the magnet parts in a plan view. The non-magnetic bodies overlap an area between the magnet units in a plan view. The magnet assembly operates in one of a first mode and a second mode. The magnetic field generator generates a magnetic field below the magnetic bodies and the non-magnetic bodies in the first mode and does not substantially generate the magnetic field below the magnetic bodies and the non-magnetic bodies in the second mode.