Switched Power Supply for Compact Z-Pinch EUV Light Sources
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Solution Overview
Problem
Existing high brightness extreme ultraviolet (EUV) light sources are limited by the performance disadvantages of magnetic switches, which are slow and physically large, hindering their reliability, compactness, and flexibility in industrial applications.
Innovation Solution
A solid-state pulsed power supply with a DC power source and a switched resonant charging circuit generates voltage pulses to create a magnetically confined Z-pinch plasma, eliminating the need for electrodes and allowing for compact, flexible, and high-frequency operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If magnetic switches are used in the power supply, then the light source can be operated, but the physical size becomes large and the switching speed becomes slow
Solution Approach 1:
The patent replaces mechanical magnetic switches with solid-state electronic switches (such as MOSFETs or IGBTs) in the power supply circuit. This substitution eliminates the physical limitations of magnetic switches, achieving faster switching speeds and more compact dimensions while maintaining the required power delivery functionality for plasma generation.
2Reliability
If magnetic switches are used in the power supply, then the light source can be operated, but the reliability decreases due to performance disadvantages
Solution Approach 1:
The patent replaces magnetic switches with solid-state electronic switches, which have no moving parts and exhibit superior reliability characteristics. The electronic switches provide consistent performance, longer operational life, and higher switching speeds, thereby improving overall system reliability while eliminating the performance disadvantages associated with magnetic switch technology.
3Reliability
If a magnetic core is used to generate plasma, then plasma can be confined, but the device complexity increases
Solution Approach 1:
The patent extracts and eliminates the magnetic core component from the system by using solid-state electronic switches that can generate the necessary electromagnetic fields without requiring a physical magnetic core. This extraction simplifies the device structure, reduces complexity, while maintaining plasma confinement capabilities through alternative electromagnetic field generation methods.
4Productivity
If switched power supplies with magnetic switches are used, then voltage pulses can be generated, but the operating frequency is limited
Solution Approach 1:
The patent replaces magnetic switches with solid-state electronic switches that can operate at significantly higher frequencies. This substitution removes the inherent frequency limitations of magnetic switches, enabling the power supply to generate voltage pulses at higher operating frequencies, thereby increasing productivity and enabling more rapid plasma generation cycles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high reliability, stability, and compactness, enabling high-brightness EUV light generation with improved scalability and flexibility, reducing debris and heat load, and enhancing the operational frequency and pulse energy of EUV sources.
Implementation Method 1
A magnetic core is positioned around a portion of the chamber and is configured to generate a plasma in the plasma generation region that converges in the plasma confinement region
Implementation Method 2
The switched resonant charging circuit includes at least one inductor and at least one capacitor configured so that the at least one inductor increases a voltage across the at least one capacitor during operation
Implementation Method 3
at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma
Data Source
AI summary
A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.