Switching Apparatus Actuator Packaging via Segmented Substrates
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Solution Overview
Problem
The existing switching apparatuses face challenges in accurate machining due to the rough surface of glass substrates etched for cavities, which complicates the formation of precise structures like fixed contact points and vias, affecting the reliability and accuracy of signal transmission.
Innovation Solution
A switching apparatus is designed with a first substrate having vias for electrical connection, a second substrate with a through-hole housing an actuator, and a third substrate supporting the actuator, maintaining an air-tight state and using conductive oxide films between piezoelectric films and electrodes to increase lifespan and prevent physical damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a glass substrate is etched to form a cavity housing the actuator, then the actuator can be packaged and protected, but the surface becomes rough making precise machining of contact points and vias difficult
Solution Approach 1:
The device is divided into separate functional modules: the glass substrate forms the cavity housing, while the actuator substrate provides the mounting surface for contact points and vias. This segmentation allows each substrate to be optimized for its specific function without compromising the other.
Solution Approach 2:
An actuator substrate is introduced as an intermediary component between the glass substrate and the actuator. This intermediate layer provides a suitable surface for precise machining of contact points and vias, while the glass substrate maintains its protective cavity function.
2Ease of manufacture
If structures like fixed contact points and vias are formed on the rough glass substrate surface, then electrical connections can be established, but machining accuracy deteriorates
Solution Approach 1:
The electrical connection structures are segregated onto a separate actuator substrate rather than being formed directly on the glass substrate. This allows independent optimization of the manufacturing processes for each component.
Solution Approach 2:
The actuator substrate serves as an intermediary platform that facilitates the formation of precise electrical connection structures. It provides a stable, machinable surface for creating accurately positioned contact points and vias that would be difficult to achieve on the etched glass surface.
3Adaptability or versatility
If piezoelectric films are used in the actuator, then switching functionality is achieved, but the films are susceptible to physical damage
Solution Approach 1:
Protective structures are incorporated into the actuator design to cushion and protect the piezoelectric films from physical damage before such damage can occur. This preemptive protection extends the lifespan and reliability of the piezoelectric components.
Solution Approach 2:
The actuator design incorporates flexible support structures and protective layers that conform to the piezoelectric films, providing mechanical protection while maintaining the films' functional properties. These protective elements absorb mechanical stress and prevent direct damage to the piezoelectric material.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the accuracy and reliability of signal switching by preventing physical damage and increasing the rigidity of the actuator, while maintaining an air-tight state and improving the lifespan of piezoelectric films, allowing for precise and reliable electrical connections.
Implementation Method 1
An actuator is known that is formed on a semiconductor substrate, includes piezoelectric film and electrodes applying voltage to the piezoelectric film, and operates according to expansion and contraction of the piezoelectric film by applying voltage thereto
Data Source
AI summary
A package of a switching apparatus that houses an actuator having a movable contact point and in which a fixed contact point, which is electrically connected to or disconnected form the movable contact point, is accurately formed. Provided is a switching apparatus comprising a first substrate provided with a via that electrically connects a top surface thereof and a bottom surface thereof, while maintaining an air-tight state between the top surface and the bottom surface; a second substrate provided on the first substrate and in which is formed a through-hole that houses an actuator; and a third substrate provided on the second substrate and supporting the actuator, which has a moveable contact point.