Mechanical Switching Valve for Lithography Vacuum Holding
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Solution Overview
Problem
In lithography apparatuses, existing solutions for quickly changing pressure in vacuum holding systems require complex modifications and increased costs due to the integration of electronic components, complicating the control system and device arrangement.
Innovation Solution
A switching valve mechanism that allows communication between two spaces based on pressure differences without electronic components, using a housing with a movable valve element and a pressing member to control pressure changes in the vacuum holding apparatus, enabling quick pressure adjustments for efficient holding and releasing of objects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If an electromagnetic valve is added to quickly change pressure for holding and releasing substrates, then the response speed of suction/vacuum break is improved, but the control system becomes more complex and device cost increases
Solution Approach 1:
The patent replaces the electromagnetic valve (electrical system) with a purely mechanical switching valve that uses pressure differential to automatically open or close ports. The valve element responds directly to pressure differences between ports without requiring electrical control signals, thereby eliminating the need for additional electrical wiring and control programs while maintaining fast response speed.
Solution Approach 2:
The switching valve operates autonomously by using the pressure differential between its own ports to control its state. When pressure at one port exceeds a threshold relative to another port, the valve element automatically shifts position to open or close communication paths, without requiring external control systems. This self-regulating mechanism simplifies the overall control architecture.
2Speed
If an electromagnetic valve is added to quickly change pressure for holding and releasing substrates, then the response speed of suction/vacuum break is improved, but device cost increases
Solution Approach 1:
The patent employs a simple mechanical switching valve with basic components (housing, valve element, pressing member, ports) that can be manufactured at lower cost compared to electromagnetic valves. The mechanical design avoids expensive electrical components, complex wiring harnesses, and associated control electronics, resulting in a more cost-effective solution that achieves the same functional goal of rapid pressure change.
3Device complexity
If a switching valve with pressure differential control is used instead of an electromagnetic valve, then device complexity is reduced, but the ability to precisely control pressure timing may be affected
Solution Approach 1:
The switching valve is designed with a valve element that can dynamically respond to changing pressure conditions. The pressing member applies a baseline force to the valve element, creating a threshold that must be exceeded by pressure differential to trigger state changes. This dynamic response allows the valve to automatically adapt to varying operating conditions while maintaining precise timing through purely mechanical means.
Solution Approach 2:
The patent controls pressure timing by manipulating the pressure differential parameter between ports rather than using electrical control signals. By adjusting the magnitude and timing of pressure changes at input ports, the system achieves precise control over when the valve element shifts position and when communication paths open or close, maintaining timing precision through physical parameter control instead of electrical signaling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for rapid and efficient pressure changes in vacuum holding systems, simplifying the arrangement and control, reducing costs, and improving throughput without the need for electronic components, thus enhancing the performance of lithography apparatuses.
Implementation Method 1
a valve element configured to be movable in the housing so as to selectively allow one of the first port and the second port to communicate with the third port in accordance with a pressure difference between the first port and the second port
Implementation Method 2
a pressing member configured to press the valve element toward a side of the first port
Data Source
AI summary
The present invention provides a switching valve comprising: a housing including a first port, a second port, and a third port; a valve element configured to be movable in the housing so as to selectively allow one of the first port and the second port to communicate with the third port in accordance with a pressure difference between the first port and the second port; and a pressing member configured to press the valve element toward a side of the first port.