Symmetric Plasma Chamber Flow Valve for Uniform Conductance
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Solution Overview
Problem
Existing substrate processing chambers suffer from non-symmetric flow, particle deposits, and difficult serviceability due to the design of conventional flow valves.
Innovation Solution
A symmetric flow valve with a centrally located actuator and poppet mechanism that ensures uniform flow and reduces contamination by minimizing obstructions, featuring a non-linear arrangement of openings and a poppet that selectively seals these openings or a port opening.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional flow valve design is used, then the valve can regulate pressure and flow, but it promotes non-symmetric flow and facilitates particle deposits
Solution Approach 1:
The patent applies asymmetry by inverting the conventional valve design - placing the actuator at the bottom rather than the top, and positioning the poppet to seal against the top plate openings rather than the bottom plate port. This inverted asymmetric configuration creates symmetric flow patterns through the valve body, eliminating the non-symmetric flow and particle deposit issues of conventional designs
2Reliability
If a conventional flow valve design is used, then the valve can regulate pressure and flow, but it is hard to service
Solution Approach 1:
The valve body is segmented into distinct sections with the top plate, bottom plate, and sidewalls forming separable components. The poppet and actuator assembly can be removed as a unit from the bottom, allowing easy access for servicing while maintaining the sealed interior volume when assembled
Solution Approach 2:
The actuator and poppet coupling is inverted compared to conventional designs - the actuator is positioned at the bottom and couples to the lower surface of the poppet rather than from the top. This inversion allows the actuator to be accessed and serviced from the bottom of the valve body, greatly improving serviceability
3Reliability
If the poppet seals against multiple openings, then flow control is improved, but the structure becomes more complex
Solution Approach 1:
The poppet serves multiple functions: it seals against the top plate openings to control flow to individual chambers, seals against the bottom plate port opening for overall flow control, and is actuated by a single actuator mechanism. This multi-functionality provides sophisticated flow control without requiring multiple separate valve mechanisms
Data Source
AI summary
Embodiments of symmetric flow valves for use in substrate processing chambers are provided herein. In some embodiments, a symmetric flow valve includes: a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes a plurality of axisymmetrically disposed openings arranged in a non-linear manner, and wherein the bottom plate includes a port opening; an actuator disposed above the top plate and coupled to a central region of the top plate radially inward of the plurality of axisymmetrically disposed openings; and a poppet disposed in the interior volume and coupled to the actuator to move the poppet vertically within the interior volume, wherein the poppet is configured to selectively seal the plurality of axisymmetrically disposed openings or the port opening.