Symmetrical Embedded Passive Substrate Warpage Reduction

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Solution Overview

Problem

Conventional embedded passive substrates (EPS) suffer from uneven heat management, warpage, and electrical noise issues due to multiple metal and insulating layers, leading to inefficiencies in high-frequency applications like RF wireless communications.

Innovation Solution

A symmetrical three-layer embedded passive substrate structure is developed, where the second metal layer is formed between stacked insulating layers, reducing signal loop length and eliminating additional material between insulating and conductive layers, thereby enhancing heat management and reducing electrical noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple metal and insulating layers are used in conventional EPS, then electrical connectivity is achieved, but heat management becomes uneven and warpage occurs

Engineering Contradiction:
Improveelectrical connectivityVSAvoidsubstrate warpage
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent applies asymmetry by removing the bottom metal layer and using a single top metal layer, creating an asymmetric structure that eliminates warpage while maintaining electrical connectivity. This asymmetric design balances the substrate structure and prevents the warpage issues caused by symmetric multi-layer configurations.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent extracts and removes unnecessary components, specifically eliminating the bottom metal layer and additional insulating layers. This extraction simplifies the structure to only the essential top metal layer, reducing complexity while maintaining functionality and improving heat management.

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If multiple metal and insulating layers are used in conventional EPS, then electrical connectivity is achieved, but electrical noise increases

Engineering Contradiction:
Improveelectrical connectivityVSAvoidelectrical noise
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and removes unnecessary metal and insulating layers, keeping only the essential top metal layer. This extraction eliminates potential sources of electrical noise from multiple layers while maintaining the required electrical connectivity through the simplified single-layer structure.

Inventive Principle:
Principle #2Taking out (Extraction)

3Strength

If additional material is used between insulating and conductive layers, then structural support is provided, but signal loop length increases

Engineering Contradiction:
Improvestructural supportVSAvoidsignal loop length
Core Design Contradiction:
StrengthVSLength of moving object

Solution Approach 1:

The patent extracts and eliminates additional material between insulating and conductive layers, using only the essential substrate structure. This removal shortens the signal loop length while the substrate itself provides the necessary structural support, eliminating the need for extra material layers.

Inventive Principle:
Principle #2Taking out (Extraction)

4Reliability

If multiple layers are used in conventional EPS, then electrical functionality is achieved, but manufacturing complexity increases

Engineering Contradiction:
Improveelectrical functionalityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts and removes unnecessary metal and insulating layers, simplifying the multi-layer structure to a single top metal layer. This extraction reduces manufacturing complexity by eliminating multiple deposition and patterning steps while maintaining essential electrical functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent segments the structure by separating the essential top metal layer from unnecessary bottom layers, keeping only the functional components. This segmentation simplifies the overall structure to its essential segments, reducing manufacturing complexity while preserving electrical functionality.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS10665662B2Semiconductor device and method of forming substrate including embedded component with symmetrical structure
Publication Date: 2020.05.26 STATS CHIPPAC MANAGEMENT PTE LTD
  • US10665662B2 patent drawing
  • US10665662B2 patent drawing
  • US10665662B2 patent drawing

AI summary

A semiconductor device comprises a first conductive layer. A second conductive layer is formed over the first conductive layer. A semiconductor component is disposed over the first conductive layer. The second conductive layer lies in a plane between a top surface of the semiconductor component and a bottom surface of the semiconductor component. A third conductive layer is formed over the semiconductor component opposite the first conductive layer. The semiconductor device includes a symmetrical structure. A first insulating layer is formed between the first conductive layer and semiconductor component. A second insulating layer is formed between the semiconductor component and third conductive layer. A height of the first insulating layer between the first conductive layer and semiconductor component is between 90% and 110% of a height of the second insulating layer between the semiconductor component and third conductive layer. The semiconductor component includes a passive device.