Synchronized Mass Gyroscope Anti-Phase Coupling
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Solution Overview
Problem
Microelectromechanical systems (MEMS) gyroscopes face challenges in achieving synchronous, anti-phase motion of multiple proof masses while rejecting unwanted motion and acceleration, leading to sensitivity issues and momentum imbalances.
Innovation Solution
The implementation of linearly moving couplers, referred to as 'runners,' which couple multiple proof masses to enforce anti-phase motion, preventing symmetric motion and ensuring momentum balance by moving in opposite directions, thus constraining the proof masses to synchronous, linear anti-phase motion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple proof masses are mechanically coupled together to provide synchronous motion, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The device divides the proof mass into multiple separate masses (first proof mass, second proof mass, third proof mass, fourth proof mass) that are mechanically coupled through tethers and couplers. Each mass can move independently in anti-phase, allowing synchronous motion patterns that enhance rotation detection precision while distributing the complexity across modular components.
Solution Approach 2:
Tethers and couplers serve as intermediary elements that mechanically connect the multiple proof masses. The tethers couple each proof mass to the substrate, while additional couplers connect the proof masses to each other, enabling controlled anti-phase motion patterns that improve measurement precision without requiring direct complex coupling between all masses.
2Object-affected harmful factors
If proof masses are coupled to enforce anti-phase motion, then acceleration sensitivity is reduced, but manufacturing precision requirements increase
Solution Approach 1:
The device enforces anti-phase motion patterns where adjacent proof masses move in opposite directions (e.g., first mass moves right while second mass moves left). This asymmetric motion pattern causes acceleration forces acting on all masses to cancel out, reducing acceleration sensitivity. The couplers are specifically designed to enable and constrain this anti-phase motion while being tolerant to manufacturing variations through symmetric placement.
Solution Approach 2:
The multiple proof masses act as counterweights to each other through their anti-phase motion. When acceleration forces act on the system, the masses moving in opposite directions generate opposing inertial forces that cancel each other out, effectively compensating for acceleration effects and reducing sensitivity to linear acceleration.
3Stability of the object's composition
If linearly moving couplers are used to couple proof masses, then momentum balance is improved, but device complexity increases
Solution Approach 1:
The couplers are designed to move linearly rather than pivot or rotate, creating a dynamic coupling mechanism. The couplers translate the anti-phase motion of adjacent proof masses into linear displacement, maintaining momentum balance throughout the operation. This dynamic linear motion approach simplifies the coupling mechanism compared to traditional pivoting linkages while preserving momentum conservation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the accuracy and sensitivity of MEMS gyroscopes by reducing acceleration sensitivity and momentum imbalances, allowing for precise rotation detection and improved signal-to-noise ratio, while maintaining decoupling of drive and sense modes.
Implementation Method 1
a first proof mass coupled to the substrate by a first tether and configured to move linearly, and a second proof mass coupled to the substrate by a second tether and configured to move linearly
Implementation Method 2
a first coupler coupling the first and second proof masses together and configured to move linearly when the first proof mass moves in a first direction and the second proof mass moves in a second direction opposite the first direction
Implementation Method 3
When the gyroscope experiences rotation, the proof mass additionally moves along an axis different than the drive axis, sometimes referred to as the sense axis
Data Source
AI summary
Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.