Synchronous Grid Power Control for Stable Gridded Ion Sources
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Solution Overview
Problem
High power ion beam applications face challenges with plasma instabilities and arcing due to asynchronous operation of grid power supplies, leading to reliability and repeatability issues in ion source systems, particularly in high power density environments where precise control of ion beam power is critical.
Innovation Solution
An integrated synchronous system (ISS) that separates the load from grid power supplies, utilizing high-power insulated gate bipolar transistors (IGBTs) and fast sensing electronics with a customizable firmware algorithm to enable synchronized control of ion beam ignition, extraction, plasma recovery, arc suppression, and diagnostics, eliminating delays and physical shutters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If grid power supplies operate asynchronously to enable fast ion beam switching, then ion beam extraction speed is improved, but plasma instabilities and arcing increase
Solution Approach 1:
The control system continuously monitors plasma parameters and adjusts power supply synchronization in real-time, using feedback signals to maintain stable operation during fast switching transitions between extraction modes
Solution Approach 2:
The system dynamically adjusts the synchronization between grid power supplies based on operating conditions, transitioning from asynchronous operation during extraction to synchronized operation during plasma maintenance to optimize both speed and stability
2Reliability
If physical shutters are used to control ion beam extraction, then beam switching reliability is improved, but system complexity and contamination risk increase
Solution Approach 1:
The patent replaces mechanical physical shutters with an electronic control system that uses synchronized power supply switching and RF generator control to achieve beam extraction and termination, eliminating moving parts and mechanical complexity while maintaining reliability
3Stability of the object's composition
If grid power supplies have long rise and fall times, then power supply stability is improved, but ion beam extraction response time worsens
Solution Approach 1:
The system uses periodic pulsed operation with controlled rise and fall cycles, where the power supplies are switched in synchronized pulses that provide both fast response and stable operation during the active beam extraction phase
Solution Approach 2:
The control system pre-charges capacitor networks and prepares power supply circuits before beam extraction is requested, reducing the effective rise time while maintaining stable operation during the actual extraction period
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ISS provides stable and reliable operation by synchronizing grid power supplies, reducing plasma instabilities, and enabling instant transitions between power levels, resulting in improved wafer yield and throughput with reduced scrap and contamination.
Implementation Method 1
The ISS utilizes a series of high-power insulated gate bipolar transistors (IGBTs) as well as fast sensing electronics
Implementation Method 2
The ISS utilizes a series of high-power insulated gate bipolar transistors (IGBTs) as well as fast sensing electronics
Data Source
AI summary
An ion beam system including an integrated power control system between the power supplies and the grids. The power control system includes a fast, high-power solid state switch such as an insulated gate bipolar transistor (IGBT). The power control system may include a resistor array, e.g., to dissipate current surge. The integrated power control system provides synchronous operation of the grid power supplies.