Synchronous MEMS Mirror Array Coupling for LiDAR

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Solution Overview

Problem

LiDAR systems are often expensive, large, and bulky, limiting their widespread adoption in autonomous vehicles due to the need for multiple emitters to achieve accurate tracking over large ranges and fields-of-view, and face challenges in synchronizing the movement of micro-mirrors in arrays due to manufacturing variations.

Innovation Solution

A MEMS-based micro-mirror array system with a support frame and coupling elements that mechanically synchronize the rotation of multiple mirror elements, allowing for a smaller, lighter design that achieves a larger mirrored area with reduced power consumption and improved reliability by ensuring synchronous movement across the array.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple emitters are used to achieve accurate tracking over large ranges and fields-of-view, then measurement precision is improved, but device complexity and size increase

Engineering Contradiction:
Improvetracking accuracyVSAvoidsystem size
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple mirror elements into a single integrated micro-mirror array structure that can be controlled collectively. This merging approach maintains the precision benefits of multiple reflective surfaces while reducing overall system complexity by sharing common support structures, actuators, and control electronics across all mirror elements.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent divides the mirror surface into multiple discrete mirror elements arranged in an array. Each element can be independently controlled to specific angular positions, enabling precise light steering across large fields-of-view without requiring multiple separate emitter systems. This segmentation allows accurate tracking while maintaining a compact single-unit structure.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If manufacturing variations occur in micro-mirror arrays, then manufacturing precision deteriorates, but production ease is improved

Engineering Contradiction:
Improveproduction feasibilityVSAvoidmirror synchronization
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent incorporates feedback mechanisms that monitor the angular positions of individual mirror elements and adjust control signals to compensate for manufacturing variations. This closed-loop control ensures that all mirror elements achieve precise synchronization despite tolerances in mechanical fabrication, maintaining high positioning accuracy while allowing standard manufacturing processes.

Inventive Principle:
Principle #23Feedback

3Reliability

If mirror elements are mechanically coupled to ensure synchronous movement, then reliability is improved, but device complexity increases

Engineering Contradiction:
Improvemovement synchronizationVSAvoidcoupling structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent introduces a common support structure and shared actuation mechanism that serves as an intermediary between control electronics and individual mirror elements. This intermediary structure mechanically couples all mirror elements together, ensuring synchronous movement and reliable operation while keeping the coupling design standardized and manageable through modular architecture.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables faster scanning speeds with reduced power consumption and improved reliability by synchronizing the movement of micro-mirrors, overcoming the limitations of large and bulky LiDAR systems while maintaining high precision and field-of-view performance.

Implementation Method 1

a coupling element having a distal end coupled to a first portion of the first mirror element and a proximal end coupled to a second portion of the second mirror element, whereby the coupling element physically couples the first and second mirror elements

Methodology Applied
Scientific EffectMechanical coupling: Mechanical Force

Data Source

PatentUS10908409B2Coupled and synchronous mirror elements in a LiDAR-based micro-mirror array
Publication Date: 2021.02.02 SHANGHAI INSYNC RESONANCE TECHNOLOGY CO
  • US10908409B2 patent drawing
  • US10908409B2 patent drawing
  • US10908409B2 patent drawing

AI summary

Some embodiments include a MEMS apparatus configured to redirect light in a LiDAR system and includes a support frame and a plurality of mirror elements disposed in a linear array within the support frame including a first mirror element and a second mirror element. Each of the plurality of mirror elements can be rotatable on a rotational axis that is perpendicular to a line defined by the linear array of the plurality of mirror elements and bisects the corresponding mirror element into a first portion and a second portion. The apparatus can include a coupling element having a distal end physically coupled to a first portion of the first mirror element and a proximal end physically coupled to a second portion of the second mirror element such that a rotation of the first mirror element causes a synchronous and equal rotation of the second mirror element.