Synchrotron EUV Light Source With Parallel Accelerators
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Solution Overview
Problem
Existing EUV light sources for semiconductor manufacturing face challenges in achieving high brightness and stability, require large installation spaces, and consume excessive power, while existing synchrotron light sources are inefficient and bulky.
Innovation Solution
A synchrotron light source design incorporating multiple linear accelerators and permanent magnets to accelerate and control electron beams, producing high-power EUV light without booster rings or electromagnets, minimizing power consumption and space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If existing synchrotron light sources use traditional accelerator designs with booster rings and electromagnets, then they can accelerate electron beams, but they consume excessive power and require large installation spaces
Solution Approach 1:
The patent extracts and removes the booster ring and electromagnet components from the traditional synchrotron light source design. By eliminating these power-intensive and space-consuming components, the invention achieves high-power EUV light production with minimized power consumption and compact installation space, directly resolving the technical contradiction between power consumption and installation space requirements.
2Illumination intensity
If existing EUV light sources are designed to achieve high brightness and stability, then they can produce quality EUV light, but they require large installation spaces and consume excessive power
Solution Approach 1:
The patent replaces the traditional mechanical/electromagnetic acceleration system (booster ring and electromagnets) with a linear accelerator system. This substitution maintains the capability to produce high-brightness EUV light through electron beam acceleration while dramatically reducing the installation space required, as linear accelerators have a more compact footprint compared to circular booster ring designs.
3Productivity
If traditional synchrotron light sources use booster rings and electromagnets for electron beam acceleration, then they can function as light sources, but they are inefficient and bulky
Solution Approach 1:
The patent segments the electron beam acceleration process into multiple linear accelerator stages arranged in parallel. This segmentation allows for more efficient electron beam acceleration compared to a single large booster ring, while the modular linear accelerator design reduces the overall device size. The segmented approach improves productivity by enabling more efficient energy conversion to EUV light while minimizing the physical footprint of the facility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a high-power synchrotron light source capable of producing stable EUV light efficiently, reducing power consumption and installation space, and improving upon existing EUV light sources.
Implementation Method 1
an electron gun for producing an electron beam
Implementation Method 2
a plurality of accelerators arranged parallel to one another to continuously accelerate the electron beam produced from the electron gun
Implementation Method 3
a storage ring for storing the electron beam accelerated through the plurality of accelerators
Implementation Method 4
an undulator for producing the synchrotron radiation from the electron beam stored in the storage ring
Data Source
AI summary
The present disclosure relates to a synchrotron light source for producing synchrotron radiation through acceleration of an electron beam, including: an electron gun for producing the electron beam; a plurality of accelerators arranged parallel to one another to continuously accelerate the electron beam produced from the electron gun; a storage ring for storing the electron beam accelerated through the plurality of accelerators; and an undulator for producing the synchrotron radiation from the electron beam stored in the storage ring.