Modular Synchrotron EUV Source With Parallel LINAC Acceleration
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Solution Overview
Problem
Existing EUV light sources for semiconductor manufacturing face challenges in achieving high brightness and stability, require large installation spaces, and consume excessive power, while existing synchrotron light sources lack efficiency and compactness.
Innovation Solution
A synchrotron light source design incorporating multiple linear accelerators and permanent magnets to accelerate and control electron beams, producing high-power EUV light with reduced power consumption and minimized space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If existing EUV light sources are used for semiconductor manufacturing, then EUV light can be produced, but high power consumption and large installation space are required
Solution Approach 1:
The accelerator system is divided into multiple linear accelerator modules (LINAC1, LINAC2, LINAC3) that can be arranged in series. Each module independently accelerates the electron beam, allowing for distributed power consumption and modular optimization of energy efficiency across the system.
Solution Approach 2:
The patent transitions from a conventional circular accelerator layout to a linear accelerator arrangement, changing the spatial dimension of the acceleration path. This linear configuration reduces the installation footprint while maintaining acceleration effectiveness through multi-stage linear acceleration.
2Area of stationary object
If existing synchrotron light sources are used, then electron beam acceleration is achieved, but the installation space is large and power consumption is excessive
Solution Approach 1:
The accelerator is segmented into three distinct linear accelerator modules that can be arranged compactly in series. This segmentation allows for optimized space utilization while maintaining the total acceleration required for high-energy electron beams, thereby reducing overall installation space.
Solution Approach 2:
Multiple linear accelerator modules are combined in a series configuration within a compact arrangement. The merged system achieves the cumulative acceleration effect of multiple stages while occupying less space than conventional single-stage or circular accelerator designs.
3Reliability
If high brightness and stability are achieved in EUV light source, then EUV measurements can be performed, but device complexity increases
Solution Approach 1:
The accelerator system is divided into multiple independent linear accelerator modules, each contributing to the overall electron beam energy. This segmentation allows for independent optimization and control of each module, improving system reliability while managing complexity through modular design.
Solution Approach 2:
The linear accelerator modules serve multiple functions: they accelerate electrons to required energies, can be independently tuned for different beam energies, and provide redundancy for stable operation. This multi-functionality achieves high brightness and stability without proportionally increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves high-power EUV light production with reduced power consumption and compact installation, suitable for semiconductor manufacturing processes.
Implementation Method 1
an electron gun for producing an electron beam
Implementation Method 2
a plurality of accelerators arranged parallel to one another to continuously accelerate the electron beam produced from the electron gun
Implementation Method 3
a storage ring for storing the electron beam accelerated through the plurality of accelerators
Implementation Method 4
an undulator for producing the synchrotron radiation from the electron beam stored in the storage ring
Data Source
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AI summary
The present disclosure relates to a synchrotron light source for producing synchrotron radiation through acceleration of an electron beam, including: an electron gun for producing the electron beam; a plurality of accelerators arranged parallel to one another to continuously accelerate the electron beam produced from the electron gun; a storage ring for storing the electron beam accelerated through the plurality of accelerators; and an undulator for producing the synchrotron radiation from the electron beam stored in the storage ring.