System for a semiconductor fabrication facility and method for operating the same

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Solution Overview

Problem

Automated Material Handling Systems (AMHS) in semiconductor fabrication facilities face efficiency challenges in handling and transporting 300 mm wafers due to contamination from OHT vehicles, which generate particles from friction with rails, leading to manual cleaning that is time-consuming and inadequate, causing manufacturing downtime and potential equipment contamination.

Innovation Solution

An automatic cleaning unit is introduced, equipped with sensors to detect OHT vehicles and activate vacuum cleaning equipment for automatic removal of particles from three directions, ensuring cleanliness without manual intervention.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual cleaning of OHT vehicles is performed, then particles can be removed from the vehicles, but the cleaning process is time-consuming and causes manufacturing downtime

Engineering Contradiction:

Improvecleanliness of OHT vehiclesVSAvoidcleaning time and manufacturing downtime

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The OHT vehicle is equipped with a self-cleaning mechanism that automatically removes particles during its operation. The cleaning unit includes a brush assembly and suction device that activate when the vehicle enters the cleaning zone, enabling the vehicle to clean itself without external manual intervention, thus eliminating cleaning downtime while maintaining reliability

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The cleaning unit is positioned along the OHT rail to perform cleaning actions before the vehicle reaches critical processing areas. The system detects the approaching vehicle and activates the cleaning mechanism in advance, removing particles before they can contaminate sensitive equipment, thereby maintaining cleanliness without causing production delays

Inventive Principle:

Principle #10Preliminary action

2Productivity

If OHT vehicles operate continuously to maintain productivity, then manufacturing efficiency is improved, but particle generation from friction with rails increases contamination risk

Engineering Contradiction:

Improvemanufacturing efficiencyVSAvoidparticle contamination from OHT vehicles

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The system converts the harmful friction between OHT vehicle wheels and rails that generates particles into a beneficial cleaning opportunity. The cleaning unit is strategically positioned to capture and remove particles at the source during normal vehicle operation, transforming the continuous movement that causes contamination into a routine cleaning cycle that maintains productivity while eliminating contamination risks

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Object-affected harmful factors

If frequent manual cleaning is performed to maintain cleanliness standards, then contamination is reduced, but manufacturing downtime increases

Engineering Contradiction:

Improveequipment contaminationVSAvoidmanufacturing output

Core Design Contradiction:

Object-affected harmful factorsVSProductivity

Solution Approach 1:

The cleaning system operates continuously alongside vehicle movement rather than requiring periodic shutdowns for manual cleaning. As each OHT vehicle passes through the cleaning zone, it undergoes automatic particle removal, ensuring continuous protection against equipment contamination while maintaining uninterrupted manufacturing productivity

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The automatic cleaning unit serves as an intermediary between the OHT vehicle and the processing equipment. It intercepts and removes particles generated during vehicle operation before they can reach and contaminate sensitive processing equipment, thereby protecting equipment without requiring manufacturing interruptions

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The automatic cleaning unit significantly reduces cleaning time, improves cleanliness standards, and minimizes downtime by automatically cleaning OHT vehicles as they pass through designated zones, potentially reducing the cycle time from three months to one week for all vehicles.

Implementation Method 1

equipped with sensors to detect OHT vehicles and activate vacuum cleaning equipment for automatic removal of particles

Methodology Applied

Scientific EffectVacuum suction: Suction

Data Source

PatentUS11183409B2System for a semiconductor fabrication facility and method for operating the same

Publication Date: 2021.11.23 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OHT rails in the cleaning zone. The top cleaning part is coupled to the vacuum generator. The vacuum generator is turned on to perform a vacuum cleaning operation when the sensors detect the OHT vehicle entering the cleaning zone.