Ta-C Coatings on Si3N4 for High-Temperature Wear

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Solution Overview

Problem

Conventional diamond-like carbon (DLC) coatings are unstable at high temperatures, leading to issues such as rapid wear and limited lifespan in applications like glass lens moulds and thermal printing heads, necessitating the development of temperature-resistant carbon coatings.

Innovation Solution

A multi-layer coating comprising a seed layer of SiC, a thermally insulating layer of Si3N4, an interfacial layer of SiC, and one or more layers of ta-C, which promotes adhesion and maintains hardness and wear resistance even at high temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If conventional diamond-like carbon (DLC) coatings are used, then wear resistance is improved, but temperature stability deteriorates

Engineering Contradiction:
Improvewear resistanceVSAvoidtemperature stability
Core Design Contradiction:
StrengthVSStability of the object's composition

Solution Approach 1:

The patent applies a multi-layer composite coating structure consisting of ta-C layer, SiC layer, and Si3N4 layer. Each layer serves a specific function: the ta-C layer provides wear resistance, the SiC layer provides thermal stability and adhesion, and the Si3N4 layer provides thermal insulation. This composite structure resolves the contradiction by combining materials with complementary properties to achieve both wear resistance and temperature stability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The coating is divided into multiple functional layers rather than using a single material. The segmentation allows each layer to be optimized for its specific function: the outer ta-C layer for wear resistance, the intermediate SiC layer for thermal stability and bonding, and the inner Si3N4 layer for thermal insulation. This segmentation enables simultaneous optimization of properties that would be conflicting in a single-material coating.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If hydrogenated DLC coatings are used, then ease of deposition is improved, but high-temperature stability deteriorates

Engineering Contradiction:
Improveease of depositionVSAvoidhigh-temperature stability
Core Design Contradiction:
Ease of manufactureVSStability of the object's composition

Solution Approach 1:

The patent changes the chemical composition parameter of the carbon coating from hydrogenated DLC to hydrogen-free ta-C. This parameter change fundamentally alters the material's properties, enabling it to maintain stability at high temperatures (up to 900°C) while still achieving good wear resistance. The SiC and Si3N4 layers further enhance thermal stability and provide adhesion.

Inventive Principle:
Principle #35Parameter changes

3Ease of operation

If graphite moulds are used for glass lens manufacturing, then ease of molding is improved, but service life deteriorates

Engineering Contradiction:
Improveease of moldingVSAvoidservice life
Core Design Contradiction:
Ease of operationVSDuration of action of stationary object

Solution Approach 1:

The patent applies a multi-layer composite coating (ta-C/SiC/Si3N4) to graphite moulds. The ta-C layer provides wear resistance and chemical inertness, the SiC layer provides thermal stability and adhesion, and the Si3N4 layer provides thermal insulation. This composite coating enables the graphite mould to withstand high temperatures (600-900°C) and maintain its service life while preserving the ease of molding capability.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The coating maintains high hardness and wear resistance, suitable for applications like glass lens moulds and thermal printing heads, with hardness values exceeding 2000 HV and stability up to 900°C.

Implementation Method 1

an interfacial layer comprising SiC and having a thickness of from 0.05μm to 1μm; wherein the interfacial layer promotes adhesion of the one or more layers comprising ta-C to the thermally insulating layer

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

a thermally insulating layer comprising Si3N4 and having a thickness of from 0.2μm to 1μm

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 3

The coating maintains high hardness and wear resistance, suitable for applications like glass lens moulds and thermal printing heads, with hardness values exceeding 2000 HV and stability up to 900°C

Methodology Applied
Scientific EffectHardness:

Data Source

PatentEP3877568B1Temperature resistant carbon coatings
Publication Date: 2026.03.25 NANOFILM TECH INT LTD
  • EP3877568B1 patent drawingFigure 1~3
  • EP3877568B1 patent drawingFigure 2A~2B

AI summary

The invention provides a substrate coated with a multi-layer coating, comprising in order: (a) the substrate; (b) a thermally insulating layer (e.g. Si3N4); (c) an interfacial layer (e.g. SiC); and (d) one or more layers comprising ta-C; wherein the interfacial layer promotes adhesion of the one or more layers comprising ta-C to the thermally insulating layer; and methods for producing such coatings.