Ta-Ru Bilayer Seed for IrMn Pinning in CPP Spin Valves

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Solution Overview

Problem

Conventional seed layers in CPP GMR devices, particularly with a NiFe bottom shield, face reduced effectiveness due to the ordered structure of NiFe interfering with the magnetic performance of the pinning layer, necessitating an improved seed layer that enhances pinning strength, especially in high switching fields.

Innovation Solution

A bilayer seed structure comprising tantalum and either ruthenium or copper is used to prevent structural interference from the NiFe layer, allowing for the growth of an IrMn pinning layer without magnetic complications, thereby increasing pinning strength.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a conventional single layer seed layer is used in CPP GMR devices with NiFe bottom shield, then the device structure is simple, but the pinning strength of the IrMn layer is reduced due to structural interference from the NiFe layer

Engineering Contradiction:
Improvepinning strengthVSAvoidseed layer structure
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The single layer seed layer is segmented into a bilayer structure consisting of a first seed layer (Ta) and a second seed layer (Ru or Cu). The first seed layer directly contacts the NiFe bottom shield to cancel crystallographic influence, while the second seed layer provides a suitable base for IrMn growth without magnetic interference, thereby resolving the contradiction between structural simplicity and pinning strength.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The second seed layer (Ru or Cu) acts as an intermediary between the NiFe bottom shield and the IrMn pinning layer. It mediates the interaction by providing a non-magnetic interface that prevents structural interference from propagating to the IrMn layer, thus enhancing pinning strength without requiring complex multi-layer structures.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If a single layer seed layer is used, then the manufacturing process is simple, but the growth of IrMn layer is compromised due to magnetic complications from the NiFe structure

Engineering Contradiction:
ImproveIrMn layer growthVSAvoidseed layer fabrication
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The seed layer is divided into two functional layers: the first layer (Ta) handles the interface with NiFe bottom shield to cancel crystallographic influence, and the second layer (Ru or Cu) provides a clean growth substrate for IrMn. This segmentation ensures reliable IrMn layer growth while maintaining compatibility with existing manufacturing processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention changes the material parameters of the seed layer by introducing a second layer with specific properties (non-magnetic, suitable crystal structure) that optimize the growth conditions for IrMn. This parameter change improves layer growth reliability without significantly complicating the fabrication process, as both layers can be deposited using standard sputtering techniques.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the NiFe bottom shield structure is maintained, then the device architecture is preserved, but the effectiveness of the seed layer/AFM combination is reduced

Engineering Contradiction:
Improveseed layer/AFM effectivenessVSAvoidstructural interference
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The second seed layer (Ru or Cu) serves as an intermediary that blocks the propagation of structural interference from the NiFe bottom shield to the IrMn pinning layer. This intermediary layer preserves the NiFe bottom shield architecture while eliminating its harmful structural influence on the seed layer/AFM combination effectiveness.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention extracts the harmful crystallographic influence from the NiFe bottom shield by introducing a buffer layer that cancels this influence. The second seed layer effectively removes the adverse structural effects while maintaining the necessary device architecture, thereby improving seed layer/AFM effectiveness.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The new seed layer structure significantly enhances the pinning strength of the IrMn layer, achieving a higher GMR ratio and maintaining the resistance area product, with a notable increase in the relative pinning strength as evident from the magneto-resistance plots and sample evaluations.

Implementation Method 1

the tantalum serves to cancel out the crystallographic influence of an underlying NiFe layer

Methodology Applied
Scientific EffectCrystallographic influence cancellation:

Implementation Method 2

the ruthenium or copper provide a suitable base on which to grow an IrMn layer

Methodology Applied
Scientific EffectLayer growth:

Implementation Method 3

antiferromagnetic layer 12 whose purpose is to act as a pinning agent for a magnetically pinned layer

Methodology Applied
Scientific EffectAntiferromagnetic coupling:

Implementation Method 4

Giant Magneto-Resistance or GMR) derives from the fact that electrons in a magnetized solid are subject to significantly less scattering by the lattice when their own magnetization vectors (due to spin) are parallel

Methodology Applied
Scientific EffectGiant magneto-resistance: Magnetoresistance

Data Source

PatentUS7355823B2Ta based bilayer seed for IrMn CPP spin valve
Publication Date: 2008.04.08 HEADWAY TECHNOLOGIES INC
  • US7355823B2 patent drawing
  • US7355823B2 patent drawing
  • US7355823B2 patent drawing

AI summary

The effectiveness of an IrMn pinning layer in a CPP GMR device at high switching fields has been improved by replacing the conventional single layer seed by a layer of tantalum and either ruthenium or copper. The tantalum serves to cancel out the crystallographic influence of underlying layers while the ruthenium or copper provide a suitable base on which to grow the IrMn layer.