Talbot X-Ray Microscopy With Micro-Beam Arrays for Submicron Imaging

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Solution Overview

Problem

Prior art x-ray microscopes are limited by the resolution of x-ray optics and detector pixel size, making high-resolution imaging with a large field of view difficult, and Talbot systems are typically used for low-resolution imaging.

Innovation Solution

The use of an array of micro-beams with a micro- or nano-scale beam intensity profile, generated by Talbot interference fringes, to provide selective illumination of micro- or nano-scale regions, allowing for higher efficiency and larger pixel detectors without compromising spatial resolution, by positioning the object and detector within the same 'depth-of-focus' range of the fringes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional x-ray optics and detector pixel size are used, then detector efficiency can be improved, but spatial resolution deteriorates

Engineering Contradiction:
Improvedetector efficiencyVSAvoidspatial resolution
Core Design Contradiction:
Loss of energyVSMeasurement precision

Solution Approach 1:

The invention segments the illumination into an array of discrete micro-beams, each corresponding to a specific region of the object. This segmentation allows each detector pixel to receive x-rays from only one micro-beam, eliminating cross-talk and enabling the use of larger pixel detectors without compromising spatial resolution. The micro-beam array is created through Talbot interference fringes generated by a phase grating.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention changes the illumination parameter from a continuous broad beam to a segmented micro-beam array with specific spatial periodicity. By controlling the Talbot interference pattern parameters (grating period, wavelength, propagation distance), the system achieves submicron beam dimensions that enable high spatial resolution detection with efficient large-pixel detectors.

Inventive Principle:
Principle #35Parameter changes

2Area of stationary object

If high resolution x-ray microscopy with large field of view is pursued, then field of view is improved, but resolution deteriorates to greater than 1 micron

Engineering Contradiction:
Improvefield of viewVSAvoidresolution
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The micro-beam array provides parallel illumination of multiple discrete regions across a large field of view. Each micro-beam maintains submicron resolution while covering an extended area, allowing simultaneous high-resolution imaging across the entire field of view without the resolution degradation that plagues conventional large-FOV systems.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from single-beam sequential scanning to multi-beam parallel illumination by utilizing the spatial dimension of the Talbot interference pattern. This creates an array of independent measurement channels that operate simultaneously, achieving both large field of view and high resolution through dimensional expansion of the illumination scheme.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Productivity

If Talbot systems are used for imaging, then throughput is improved, but resolution is limited to low resolution

Engineering Contradiction:
ImprovethroughputVSAvoidresolution
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The invention changes the critical parameter of the Talbot system from using it at the full Talbot distance (where fringes are large) to using it at a fractional Talbot distance (where submicron fringes are formed). This parameter change enables the same Talbot interference mechanism to produce both high-resolution micro-beams and maintains the throughput advantages of Talbot-based parallel imaging.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables submicron spatial resolution at high throughput, decoupling spatial resolution from source size and detector pixel size, and allowing for the use of less expensive, more efficient detectors with larger pixels.

Implementation Method 1

a beam-splitting grating that establishes a Talbot interference pattern

Methodology Applied
Scientific EffectTalbot interference: Interference

Implementation Method 2

a beam-splitting grating that establishes a Talbot interference pattern

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentEP3610247B1Talbot x-ray microscope
Publication Date: 2023.08.30 SIGRAY INC
  • EP3610247B1 patent drawingFigure 1A
  • EP3610247B1 patent drawingFigure 1B
  • EP3610247B1 patent drawingFigure 2A~2C

AI summary

Systems for x-ray microscopy using an array of micro-beams having a micro- or nano- scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.