Tandem Cell Deposition Chamber Integration for Continuous Processing

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Solution Overview

Problem

Conventional solar cell manufacturing processes are inefficient and lack consistency due to the need for multiple process chambers for different deposition techniques, limiting the production of high-efficiency tandem cell structures.

Innovation Solution

A substrate processing system with multiple process tools and a control system that transports substrates between chambers to deposit layers for both cells of a tandem cell structure, allowing for continuous processing and consistent layer formation using techniques like CVD, PVD, and evaporation, including perovskite layers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple process chambers are used for different deposition techniques, then various materials can be deposited on substrates, but the manufacturing process becomes inefficient and inconsistent

Engineering Contradiction:

Improvedeposition technique versatilityVSAvoidmanufacturing efficiency

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent combines multiple deposition techniques (CVD, PVD, evaporation) into a single integrated process chamber. This allows different materials to be deposited sequentially without transferring substrates between chambers, thereby maintaining versatility while improving manufacturing efficiency and consistency through continuous processing.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The process chamber is designed to perform multiple deposition functions using different techniques. A single chamber can switch between CVD, PVD, and evaporation methods to deposit various materials, eliminating the need for multiple specialized chambers and streamlining the manufacturing workflow.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Manufacturing precision

If substrates are transported between multiple process chambers, then different layers can be formed, but processing continuity is interrupted and throughput is reduced

Engineering Contradiction:

Improvelayer formation consistencyVSAvoidproduction throughput

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

Multiple deposition functions are merged into one chamber, eliminating substrate transport between chambers. This maintains layer formation consistency through controlled sequential deposition while improving throughput by removing transport interruptions and enabling continuous processing.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The single chamber design enables continuous deposition of different materials without interrupting the processing flow. Substrates remain in the chamber throughout the entire multi-layer formation process, eliminating idle transport time and maintaining continuous productive action.

Inventive Principle:

Principle #20Continuity of useful action

3Adaptability or versatility

If multiple process tools are used for tandem cell manufacturing, then complex structures can be created, but system complexity increases and costs rise

Engineering Contradiction:

Improvetandem cell structure capabilityVSAvoidsystem complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges multiple process tools into a single integrated process chamber that can perform all necessary deposition techniques for tandem cell structures. This reduces system complexity and associated costs while maintaining the capability to create complex multi-layer tandem cell architectures through sequential deposition within the same chamber.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the efficient and consistent manufacturing of tandem cell structures with increased solar cell efficiency, improving throughput and reducing costs by streamlining the production process.

Implementation Method 1

one or more first layers are deposited on a substrate in one or more first process chambers

Methodology Applied

Scientific EffectChemical Vapour Deposition: Chemical Vapour Deposition

Implementation Method 2

deposition techniques can be used depending on the material to be deposited

Methodology Applied

Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Implementation Method 3

deposition techniques like CVD, PVD, and evaporation, including perovskite layers

Methodology Applied

Scientific EffectEvaporation: Evaporation

Data Source

PatentUS20240379896A1Substrate processing system for manufacturing tandem cell structures

Publication Date: 2024.11.14 APPLIED MATERIALS INC

AI summary

A substrate processing system includes two or more process tools including multiple process chambers to perform a corresponding substrate processing procedure and a substrate transport to transport substrates between the two or more process tools. The system further includes a control system to cause one or more first layers to be deposited on a substrate in one or more first process chambers to form a first cell of a tandem cell structure. The control system is further to cause the substrate to be transported from the one or more first process chambers to one or more second process chambers. A combination process tool includes the one or more second process chambers. The control system is further to cause one or more second layers to be deposited on the substrate in the one or more second process chambers to form a second cell of the tandem cell structure.